Pfeiffer Vacuum, Inc.

Pfeiffer Vacuum Highlights Innovative Vacuum Solutions at Touch Panel Korea Trade Show
Fluid & Gas Flow Equipment

Pfeiffer Vacuum Highlights Innovative Vacuum Solutions at Touch Panel Korea Trade Show

ASSLAR, Germany • Product developments set the new benchmark in vacuum coating • Powerful vacuum pumps and leak detectors Pfeiffer Vacuum, a leading global provider of vacuum technology, will participate in the Touch Panel Korea Trade Show from August 20 to 22, 2014. Visitors to booths E25-E28 have the opportunity to discuss groundbreaking vacuum solutions with experts from Pfeiffer Vacuum....

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Fluid & Gas Flow Equipment

New Gas Analysis Systems from Pfeiffer Vacuum for Pressure Ranges up to 50 mbar

High measurement speed, stability and resolution - Easy system integration - Intuitively operable software ASSLAR, Germany - With the gas analysis systems Sputter Process Monitor SPM 220 and High Pressure Analyzer HPA 220, Pfeiffer Vacuum has brought two new products onto the market. Both system solutions are based on the proven mass spectrometer PrismaPlus in combination with a dry compressing...

Read More »
Roots Pumping Stations suit industrial applications.
Communication Systems & Equipment

Roots Pumping Stations suit industrial applications.

Featuring single-stage Unoline(TM) rotary vane pump, Standard CombiLine(TM) Pumping Stations are designed for applications that require pressure up to 7 x 10-3 mbar. Units with 2-stage DuoLine(TM) rotary vane pump are suited for applications up to 3 x 10-4 mbar, while oil-free CombiLine(TM) with RevoDry(TM) dry pump handles pressures up to 5 x 10-3 mbar. Customer-specific pumping stations that...

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Turbo Pump goes from atmosphere to high-vacuum.
Fluid & Gas Flow Equipment

Turbo Pump goes from atmosphere to high-vacuum.

Used as standalone unit or as backing pump for turbopumps, OnTool(TM) Booster pump provides one-pump solution for achieving high vacuum. It eliminates need for backing pump due to its pumping speed of 130 m³/h and pressure of less than 1 x 10-5 mbar. Suited for clean applications that operate without any particulate matter, corrosive gases, or condensation, product produces minimal vibration...

Read More »
Turbo Pumps handle heavy particulate loads.
Fluid & Gas Flow Equipment

Turbo Pumps handle heavy particulate loads.

Turbo Pumps feature combination of pumping speeds from 1,200-2,100 l/s and throughput up to 2 slpm. Rotor/bearing design ensures MTBF better than 200,000 hours. Suited for harsh duty applications, pumps are designed to operate safely even after sudden stops. All utilize integrated controller with interchangeable peripherals and cables, and are available with IP54-rated integrated power supplies...

Read More »
Magnetically Coupled Root Pumps are maintenance-free.

Magnetically Coupled Root Pumps are maintenance-free.

Magnetic Root Pumps are statically sealed against atmosphere, eliminating rotating seals that wear and leak, as well as cross contamination and oil pollution. Ranging from 250-6,000 mÂ-³/hr, units are also hermetically sealed, resulting in negligible leak rate of less than 1 x 10-5 mbar l/sec. Pumps are suited for chemical plant, coating, semiconductor, research and development, metallurgy,...

Read More »
Helium Leak Detector suits variety of applications.
Sensors, Monitors & Transducers

Helium Leak Detector suits variety of applications.

SmartTest(TM) delivers results at max inlet pressure of 25 mbar, and detects helium leaks at rate of 5 x 10-12 mbar l/sec. Unit features integrated test leak for self-calibration, vacuum and sniffer operating modes, and optional industrial proof hand held remote control. Backing pump is user-selectable to match application needs in semiconductor, automotive component testing, refrigeration, and...

Read More »
Pumps suit coating and semiconductor applications.
Fluid & Gas Flow Equipment

Pumps suit coating and semiconductor applications.

With 1,200 l/s pumping capacity, TPH 1201 turbopump is designed for harsh-duty applications with rotor geometry that permits foreline tolerance of 0.5 mbar without requiring drag stage. Performance of TPH 2301 minimizes number of pumps required in semiconductor 300 mm multi-pump chambers. It delivers 2,100 l/s for Nitrogen and 1,950 l/s for Hydrogen and Argon, while offering more than 2,000 sccm...

Read More »
Fluid & Gas Flow Equipment

Dry Vacuum Pump has integrated gas-ballast valve.

XtraDry(TM) positive displacement dry vacuum pump features piston style design that does not expose bearings to high-vacuum conditions. It provides hydrocarbon-free vacuum and does not generate particulate that can contaminate vacuum processes. Pumping speed is independent of gas species, with 2-stage version providing pumping speed of 7 mÂ-³/hr and base pressure of 0.05 mbar. Single-stage...

Read More »
Pfeiffer Vacuum Highlights Innovative Vacuum Solutions at Touch Panel Korea Trade Show
Fluid & Gas Flow Equipment

Pfeiffer Vacuum Highlights Innovative Vacuum Solutions at Touch Panel Korea Trade Show

ASSLAR, Germany • Product developments set the new benchmark in vacuum coating • Powerful vacuum pumps and leak detectors Pfeiffer Vacuum, a leading global provider of vacuum technology, will participate in the Touch Panel Korea Trade Show from August 20 to 22, 2014. Visitors to booths E25-E28 have the opportunity to discuss groundbreaking vacuum solutions with experts from Pfeiffer Vacuum....

Read More »
Fluid & Gas Flow Equipment

New Gas Analysis Systems from Pfeiffer Vacuum for Pressure Ranges up to 50 mbar

High measurement speed, stability and resolution - Easy system integration - Intuitively operable software ASSLAR, Germany - With the gas analysis systems Sputter Process Monitor SPM 220 and High Pressure Analyzer HPA 220, Pfeiffer Vacuum has brought two new products onto the market. Both system solutions are based on the proven mass spectrometer PrismaPlus in combination with a dry compressing...

Read More »
Roots Pumping Stations suit industrial applications.
Communication Systems & Equipment

Roots Pumping Stations suit industrial applications.

Featuring single-stage Unoline(TM) rotary vane pump, Standard CombiLine(TM) Pumping Stations are designed for applications that require pressure up to 7 x 10-3 mbar. Units with 2-stage DuoLine(TM) rotary vane pump are suited for applications up to 3 x 10-4 mbar, while oil-free CombiLine(TM) with RevoDry(TM) dry pump handles pressures up to 5 x 10-3 mbar. Customer-specific pumping stations that...

Read More »
Turbo Pump goes from atmosphere to high-vacuum.
Fluid & Gas Flow Equipment

Turbo Pump goes from atmosphere to high-vacuum.

Used as standalone unit or as backing pump for turbopumps, OnTool(TM) Booster pump provides one-pump solution for achieving high vacuum. It eliminates need for backing pump due to its pumping speed of 130 m³/h and pressure of less than 1 x 10-5 mbar. Suited for clean applications that operate without any particulate matter, corrosive gases, or condensation, product produces minimal vibration...

Read More »
Turbo Pumps handle heavy particulate loads.
Fluid & Gas Flow Equipment

Turbo Pumps handle heavy particulate loads.

Turbo Pumps feature combination of pumping speeds from 1,200-2,100 l/s and throughput up to 2 slpm. Rotor/bearing design ensures MTBF better than 200,000 hours. Suited for harsh duty applications, pumps are designed to operate safely even after sudden stops. All utilize integrated controller with interchangeable peripherals and cables, and are available with IP54-rated integrated power supplies...

Read More »
Magnetically Coupled Root Pumps are maintenance-free.

Magnetically Coupled Root Pumps are maintenance-free.

Magnetic Root Pumps are statically sealed against atmosphere, eliminating rotating seals that wear and leak, as well as cross contamination and oil pollution. Ranging from 250-6,000 mÂ-³/hr, units are also hermetically sealed, resulting in negligible leak rate of less than 1 x 10-5 mbar l/sec. Pumps are suited for chemical plant, coating, semiconductor, research and development, metallurgy,...

Read More »
Helium Leak Detector suits variety of applications.
Sensors, Monitors & Transducers

Helium Leak Detector suits variety of applications.

SmartTest(TM) delivers results at max inlet pressure of 25 mbar, and detects helium leaks at rate of 5 x 10-12 mbar l/sec. Unit features integrated test leak for self-calibration, vacuum and sniffer operating modes, and optional industrial proof hand held remote control. Backing pump is user-selectable to match application needs in semiconductor, automotive component testing, refrigeration, and...

Read More »
Pumps suit coating and semiconductor applications.
Fluid & Gas Flow Equipment

Pumps suit coating and semiconductor applications.

With 1,200 l/s pumping capacity, TPH 1201 turbopump is designed for harsh-duty applications with rotor geometry that permits foreline tolerance of 0.5 mbar without requiring drag stage. Performance of TPH 2301 minimizes number of pumps required in semiconductor 300 mm multi-pump chambers. It delivers 2,100 l/s for Nitrogen and 1,950 l/s for Hydrogen and Argon, while offering more than 2,000 sccm...

Read More »
Fluid & Gas Flow Equipment

Dry Vacuum Pump has integrated gas-ballast valve.

XtraDry(TM) positive displacement dry vacuum pump features piston style design that does not expose bearings to high-vacuum conditions. It provides hydrocarbon-free vacuum and does not generate particulate that can contaminate vacuum processes. Pumping speed is independent of gas species, with 2-stage version providing pumping speed of 7 mÂ-³/hr and base pressure of 0.05 mbar. Single-stage...

Read More »

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