Pfeiffer Vacuum, Inc.

Turbo Pumps handle heavy particulate loads.
Fluid & Gas Flow Equipment

Turbo Pumps handle heavy particulate loads.

Turbo Pumps feature combination of pumping speeds from 1,200-2,100 l/s and throughput up to 2 slpm. Rotor/bearing design ensures MTBF better than 200,000 hours. Suited for harsh duty applications, pumps are designed to operate safely even after sudden stops. All utilize integrated controller with interchangeable peripherals and cables, and are available with IP54-rated integrated power supplies...

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Turbo Pumps handle heavy particulate loads.
Fluid & Gas Flow Equipment

Turbo Pumps handle heavy particulate loads.

Turbo Pumps feature combination of pumping speeds from 1,200-2,100 l/s and throughput up to 2 slpm. Rotor/bearing design ensures MTBF better than 200,000 hours. Suited for harsh duty applications, pumps are designed to operate safely even after sudden stops. All utilize integrated controller with interchangeable peripherals and cables, and are available with IP54-rated integrated power supplies...

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Magnetically Coupled Root Pumps are maintenance-free.

Magnetically Coupled Root Pumps are maintenance-free.

Magnetic Root Pumps are statically sealed against atmosphere, eliminating rotating seals that wear and leak, as well as cross contamination and oil pollution. Ranging from 250-6,000 m-³/hr, units are also hermetically sealed, resulting in negligible leak rate of less than 1 x 10-5 mbar l/sec. Pumps are suited for chemical plant, coating, semiconductor, research and development, metallurgy,...

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Magnetically Coupled Root Pumps are maintenance-free.

Magnetically Coupled Root Pumps are maintenance-free.

Magnetic Root Pumps are statically sealed against atmosphere, eliminating rotating seals that wear and leak, as well as cross contamination and oil pollution. Ranging from 250-6,000 mÂ-³/hr, units are also hermetically sealed, resulting in negligible leak rate of less than 1 x 10-5 mbar l/sec. Pumps are suited for chemical plant, coating, semiconductor, research and development, metallurgy,...

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Helium Leak Detector suits variety of applications.
Sensors, Monitors & Transducers

Helium Leak Detector suits variety of applications.

SmartTest(TM) delivers results at max inlet pressure of 25 mbar, and detects helium leaks at rate of 5 x 10-12 mbar l/sec. Unit features integrated test leak for self-calibration, vacuum and sniffer operating modes, and optional industrial proof hand held remote control. Backing pump is user-selectable to match application needs in semiconductor, automotive component testing, refrigeration, and...

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Helium Leak Detector suits variety of applications.
Sensors, Monitors & Transducers

Helium Leak Detector suits variety of applications.

SmartTest(TM) delivers results at max inlet pressure of 25 mbar, and detects helium leaks at rate of 5 x 10-12 mbar l/sec. Unit features integrated test leak for self-calibration, vacuum and sniffer operating modes, and optional industrial proof hand held remote control. Backing pump is user-selectable to match application needs in semiconductor, automotive component testing, refrigeration, and...

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Pumps suit coating and semiconductor applications.
Fluid & Gas Flow Equipment

Pumps suit coating and semiconductor applications.

With 1,200 l/s pumping capacity, TPH 1201 turbopump is designed for harsh-duty applications with rotor geometry that permits foreline tolerance of 0.5 mbar without requiring drag stage. Performance of TPH 2301 minimizes number of pumps required in semiconductor 300 mm multi-pump chambers. It delivers 2,100 l/s for Nitrogen and 1,950 l/s for Hydrogen and Argon, while offering more than 2,000 sccm...

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Pumps suit coating and semiconductor applications.
Fluid & Gas Flow Equipment

Pumps suit coating and semiconductor applications.

With 1,200 l/s pumping capacity, TPH 1201 turbopump is designed for harsh-duty applications with rotor geometry that permits foreline tolerance of 0.5 mbar without requiring drag stage. Performance of TPH 2301 minimizes number of pumps required in semiconductor 300 mm multi-pump chambers. It delivers 2,100 l/s for Nitrogen and 1,950 l/s for Hydrogen and Argon, while offering more than 2,000 sccm...

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Fluid & Gas Flow Equipment

Dry Vacuum Pump has integrated gas-ballast valve.

XtraDry(TM) positive displacement dry vacuum pump features piston style design that does not expose bearings to high-vacuum conditions. It provides hydrocarbon-free vacuum and does not generate particulate that can contaminate vacuum processes. Pumping speed is independent of gas species, with 2-stage version providing pumping speed of 7 m-³/hr and base pressure of 0.05 mbar. Single-stage model...

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Fluid & Gas Flow Equipment

Dry Vacuum Pump has integrated gas-ballast valve.

XtraDry(TM) positive displacement dry vacuum pump features piston style design that does not expose bearings to high-vacuum conditions. It provides hydrocarbon-free vacuum and does not generate particulate that can contaminate vacuum processes. Pumping speed is independent of gas species, with 2-stage version providing pumping speed of 7 mÂ-³/hr and base pressure of 0.05 mbar. Single-stage...

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