J.P. Sercel Associates, Inc.
Manchester, NH 03102
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Beam Delivery System is suited for Excimer lasers.
Flexible, modular VUV Beam Delivery System is suited for Excimer lasers operating in short wavelength (157-193 nm) VUV (Vacuum Ultra Violet) wavelength range. Inert gas-purged system directs laser energy onto process material, determines laser power density on target, and determines size and shape of beam on target. Multiple interchangeable modules control intensity and fluence of laser beam as...
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Excimer Laser eliminates wafer scribing.
IX-1000 ChromaLift(TM) homogenizes laser beam profile and fires through back of sapphire wafer to de-bond GaN LED device and transfer it to substrate. Capabilities include large area-per-shot, either step and repeat or fire on-the-fly, of up to 1 x 1 cm area. Programmed via Windows 2000(TM) Software, system includes PC-controlled power meters and beam profilometer. It suits LED Lift-off...
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Imaging Lenses offer high resolution and large FOV.
Multi-Element UV Imaging Lenses include doublet, triplet, quadruplet, and 6-element objectives. Doublet objectives are wavelength flexible and can be used from 2-100x. Lenses with more elements are less flexible, since they are corrected for specific wavelengths and magnifications. High-resolution, 15x imaging lens provides 1.5 micron spot size over 2.5 x 2.5mm FOV resulting in low taper angle...
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Attenuator delivers precision laser intensity control.
Model UM-VA UV Excimer Laser Variable Beam Attenuator allows laser users to perform optics adjustments at low laser power settings for safer conditions. Dynamic range is nominally from 5-90% plus 100% transmission, while typical transmission range is less than 2% to greater than 94%. Variable transmission filter allows wide range of energy adjustment. Manual or motorized versions are available,...
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Beam Homogenizer heightens UV laser efficiency.
Fly's Eye Beam Homogenizer converts non-uniform beam of UV Excimer laser into homogeneous beam with 95% uniformity. Utilizing more than 80% of laser power, single element array adapts to most excimer lasers and offers working distances of 1-2 m with beam sizes of 8 mm to 1.5 cm. Product enables maximum amount of available laser power to be used, resulting in uniform, large area beam that can be...
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Laser System performs high-speed blue LED wafer scribing.
ChromaDice(TM) UV, diode-pumped, solid-state (DPSS) laser scriber delivers typical yields greater than 99%. System cuts well-defined, square chip with consistently narrow cuts as small as 5 microns. With throughput rating of up to 8 wafers/hr, unit utilizes process that is tolerant of wafer warp and bow. Automatic alignment takes less than 1 min to load and align with system's optical system....
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