Beam Delivery System is suited for Excimer lasers.

Press Release Summary:

Flexible, modular VUV Beam Delivery System is suited for Excimer lasers operating in short wavelength (157-193 nm) VUV (Vacuum Ultra Violet) wavelength range. Inert gas-purged system directs laser energy onto process material, determines laser power density on target, and determines size and shape of beam on target. Multiple interchangeable modules control intensity and fluence of laser beam as well as its shape and energy distribution.

Original Press Release:

JPSA Laser Introduces VUV Beam Delivery System for Excimer Lasers

Hollis, New Hampshire, USA - JPSA Laser, a leading provider of Excimer laser technology and services, announces the introduction of its new VUV Beam Delivery System (BDS) for Excimer lasers, particularly those operating in the demanding short wavelength (157-193nm) VUV (Vacuum Ultra Violet) wavelength range. Flexible, modular, and designed for quick and easy reconfigurability, this inert gas-purged system offers greater flexibility and cost savings over sealed vacuum systems, making it cost-practical for commercial and research users, especially those with a high product mix and/or medium volume production runs.

Short UV wavelength laser processing is especially suited to precision micromachining of cutting-edge medical device technologies including lab-on-a-chip, micro-fluidics, drug delivery systems, biosensors, cell sorters, cell trapping, and more. Materials such as quartz, UV grade fused silica, and Teflon can be machined at 157nm. Glasses such as Borosilicate and sensitive polymers are typically processed at 193nm. The nature of VUV Excimer laser energy is such that a Beam Delivery System (BDS) is needed to direct laser energy onto process material, determine laser power density on the target, and determine the size and shape of the beam on the target.

JPSA Laser's VUV BDS consists of multiple interchangeable modules used to control the intensity and fluence of the laser beam as well as its shape and energy distribution. Individual components include: VUV adapters, beam dumps; power meter modules; variable attenuators; telescopes; field lenses; beam homogenizers; turning mirror blocks; multi-position mask changers; imaging lenses; gas jet nozzles and more. The JPSA VUV BDS is designed such that certain modules have ports for the introduction of slightly pressurized high purity, inert gases that purge the system. Controlled leakage at specific points (such as the connection of a movable part such as an actuator to the outside) allows slight egress of gas to the outside at any point where contaminants (ambient air) might otherwise enter the system. JPSA BDS components are free of grease and lubricants to prevent deterioration and outgassing byproducts contamination of the system, seals and gaskets are shielded from exposure to UV laser light. Metal parts in contact with optics are nickel-plated or machined of billet aluminum.

JPSA products and services include UV excimer and DPSS laser micro machining systems, UV and VUV laser beam delivery systems, UV laser materials processing development, optical damage testing, and excimer laser refurbishment services. JPSA Laser operates a high-performance UV laser job shop as well as a systems engineering and manufacturing business. For more information, visit, or contact the company at 17D Clinton Drive, Hollis, NH 03049 USA, Tel. 603.595.7048, fax 603.598.3835. E-mail: .

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