MKS Instruments, Inc.
Suite 201
Andover, MA 01810
Mass Flow Controller optimizes source gas utilization.
Low Pressure πMFC offers precise control of gas flows from 1-20 sccm over wide pressure range with source gas delivery pressure as low as 4 torr. Controller can be configured for different primary implant gases such as arsine, phosphine, and boron trifluoride, and valve and sensor designs offer zero stability and accuracy for all flow conditions. Targeted for semiconductor ion implant...
Read More »Quality Monitor provides fault contribution details.
With ability to identify and correct process issues, SenseLink(TM) QM controls injection molding equipment used in manufacturing medical devices and other high-accuracy industrial applications. Evaluating part quality in real time, unit finds defects such as short/double shots, and flash/overall process drift. SenseLink QM utilizes multivariate analysis software with libraries for data...
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Control Modules suit industrial automation applications.
With built-in web browser diagnostics for deployment and support, CONTROLweb(TM) Open Control Platform Modules includes RMU Linux Logic Controller with built-in I/O and peripherals and features 32-bit PowerPC(TM) technology, Linux OS, and dual Ethernet ports. Using TCP/IP protocols to provide remote I/O with response times down to 2 msec, MicroNode and MacroNode modules enables logic flexibility...
Read More »Gas Analyzer detects trace level contamination in bulk gases.
MultiGas? Purity? Analyzer is composed of process FTIR spectrometer, high-optical throughput sampling cell, and applications-specific analysis software. It provides real-time, low-level impurity detection in high purity ammonia and nitrogen trifluoride to improve LED/semiconductor device yields and bulk gas production.
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Transducer suits high-vacuum applications.
HPSÃ-® Series 909 Mini Ion Transducer integrates hot cathode sensor and electronics control package. Bayard-Alpert type transducer measures vacuum from l0-10 to 10-2 Torr. Electron bombardment degas function is pressure controlled, automatically stopping and restarting at preset pressures. Each unit has 2 yttria-coated iridium filaments and screen to shield grid and filaments from large...
Read More »Filter Housings suit liquid or gas filtration processes.
HPSÃ-® Filter Housings are offered in draining model to decrease hold-up volume and clean-in-place model for fast system maintenance. Silicone foam HPSÃ-® Heater Jackets improve heat distribution while complying with agency and corporate personnel safety standards. Heating elements are thermostatically controlled with redundant circuitry for over- and under-temperature conditions. Molded...
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Atmospheric/Vacuum Transducer provides digital communications.
Series 902 Piezo Transducer measures absolute pressure from 10-1 to 1,000 Torr. Digital communications are available through RS-485 port including setpoint adjustments and status, analog output selection, pressure reading, measurement units selection, operating time, and transducer temperature. Analog output can be configured to 0-5 Vdc or 0-10 Vdc full scale with either linear or logarithmic...
Read More »Monitoring System provides bi-directional communication.
PC-compatible Process Environment Monitoring System (PEMS(TM)), with complete line of sensors, monitors multiple locations in real-time. It provides graphic of critical points in process, overall status of area, programmed stations, on/off-line status, system performance, alarming stations, and stations requiring service. PEMS architecture provides capability to control process through 2-way...
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Sanitary Fittings meet ASME BPE standards.
Series 25 BioPharm line of 316L stainless steel clamp fittings and buttweld components for biotechnology and pharmaceutical processing applications meet ASME requirements for ovality, end face squareness, wall thickness, and material chemistry. Raw materials used in fittings are traceable to original supplier, with CMTRs maintained on file. Fittings include automatic tube weld ferrules, gaskets,...
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Multiple Stage Valve is suitable for vacuum systems.
Compact ILP two-stage valve includes pneumatically-actuated poppet valve and bypass valve in single unit that fits into tight space constraints found in vacuum applications, such as loadlock and transfer chambers in semiconductor or optical processing. Soft start process reduces turbulent flow during initial vacuum system evacuation, for less product contamination and damage. Heater jacket is...
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