Monitoring System provides bi-directional communication.
Press Release Summary:
PC-compatible Process Environment Monitoring System (PEMS(TM)), with complete line of sensors, monitors multiple locations in real-time. It provides graphic of critical points in process, overall status of area, programmed stations, on/off-line status, system performance, alarming stations, and stations requiring service. PEMS architecture provides capability to control process through 2-way proactive communication between process/production line and monitoring system.
Original Press Release:
Novx Introduces a Process Environment Monitoring System (PEMS(TM)) with a Complete Line of Sensors
Monitor. Analyze. Control...See What Others Can't!
July 2002, San Jose, Calif - Novx Corporation, a leading supplier of ESC/ESD monitoring instruments and its associated Multiplexing System, is introducing the next generation Process Environment Monitoring System (PEMS(TM)) to reflect the needs of emerging technologies. PEMS monitors sensors in multiple locations real-time. The combination of hardware and software allows the user to monitor, analyze and control processes 24/7 365 days a year. The PEMS architecture provides the capability to control the process, reduce process variations, decrease scrap and rework and improve process yields. Improving process yields increases tool availability and in the end, factory capacity is increased. Utilizing PEMS and associated sensors provides process and tool characterization as well as a more accurate way of evaluating operator and tool performance. PEMS includes all the required environmental sensors to address any potential customer's specific application. Novx now offers a
complete line of sensors including ESD (operator monitoring, ground monitoring, field sensing, EMI, ionizer performance, etc.) temperature, humidity, air pressure differential, particle detection/monitoring, vibration, molecular and many more.
The PEMS architecture provides the capability to control the process through two-way proactive communication between the process/production line and the monitoring system, reduce process variations, decrease scrap and rework and improve process yields. Improving process yields increases tool availability and in the end, factory capacity is increased. Utilizing PEMS and associated sensors provides process and tool characterization as well as a more accurate way of evaluating operator and tool performance.
The System introduces the DART2 interface to most standard environmental sensors and "daisy-chains" on the same platform as the DART and M100. This provides significant advantages as the approach is cost-effective, while offering all the real-time data capture and reporting capabilities of much more costly alternatives. The dual-microprocessor DART2 provides maximum flexibility and direct machine tool interface in addition to "standard" data capture. This also adds automated warning and alarm capability to the system architecture. PEMS provides
a graphic of multiple critical points in the process, an overall status of the area, programmed stations, on/off-line status, system performance, alarming stations and stations requiring service, and easy navigation for access to matrix, facility, layout and configuration main screens.
Installation and system integration is based on the Novx digital platform, dramatically reducing the cost of purchase, cost of installation and the cost of ownership over time. PEMS software is very easy to leam and use. Typical training is usually completed in much less than 1 day. System installation can be done with contract labor or is easy enough (by design) to be done by in-house facilities or other competent personnel. PEMS will interface with up to 1,024 data collection locations (DART, DART2 and M100) with multiple sensors located at each of the
data collection locations.
Features
o Standard PC Compatible
o Smart Interface
o Network Files
o System Configurable
o Most Brands/Type Sensors can be used
o Remote Monitoring
o Real-time Data Capture
o Maximum Flexibility
o Machine Tool Interface
o Easy Installation and Maintenance
o User-Friendly Operator Interface
o Modular System Easily Upgradeable
o Product Mix and Match Versatility
o Unsurpassed Performance
Sensor Technology
Since Novx manufacturers its own sensors and has become an OEM for other sensor types. Novx can better support PEMS with sensors that will improve performance, reliability, and at the same time reduce costs for the customer. PEMS integration also becomes much simpler with the sensor data output protocol configured to maximize accuracy and speed of operation. The sensors are designed to operate directly linked to the Novx
PEMS or operate stand-alone with LED and audible alarm outputs. Also, with the architecture selected, PEMS is truly a proactive system with bi-directional communication capability. This strategic capability provides real-time auto-alarm/warning information from the PC to the workstation, process tool or any other facility location without operator intervention. The environmental sensors and/or equipment that PEMS can presently monitor are:
o Ionization (balance and system alarm)
o EMI (pulse count and magnitude)
o Electrostatic Charge
o Electrostatic Discharge
o Airborne Particles
o Liquid Particles
o Temperature
o Relative Humidity
o Air Pressure Differential
o Vibration
About Novx Corporation
Novx founded in 1989, is a leading provider of workstation/process equipment monitors and process environment
management solutions. The company provides products and services to the semiconductor, storage device, flat panel display, electronics manufacturing services, medical and many other industries.
Novx customers use its products and services to monitor electrostatic charge, and the process environment, thereby;
improving manufacturing yields, finished product quality, and manufacturing equipment performance. The shrinking geometries of today's electronic devices place greater importance on knowing what is happening within your processes. The Novx Process Environment Monitoring System makes this possible. Novx assists customers in achieving higher productivity levels by mitigating the adverse effects of Electrostatic Discharge (ESD), Electromagnetic Interference (EMI) and Electrostatic Attraction (ESA) from the manufacturing environment. With the introduction of PEMS, Novx can now supply the complete environmental monitoring solution, thereby reducing scrap and improving product quality in any manufacturing environment.
Novx Corporation is headquartered at 830 Jury Court, San Jose, CA 95112, (408) 998-5555 ph, (408) 998-1414 fax, 1-800-728-Novx, info@novxcorp.com, http://www.novxcorp.com/html/pems.html.
Editorial Contacts
Steve Heymann, CEO
Lem Hollins, Vice President of Marketing and Sales
