Company News

MKS Instruments, Inc.

2 Tech Dr., Suite 201, Andover, MA, 01810, USA

  • 800-227-8766

Latest New Product News from
MKS Instruments, Inc.

Machinery & Machining Tools, Optics & Photonics

BeamCheck™ Beam Profiling System comes with high resolution CCD camera.

March 15, 2017

Suitable in selective laser sintering and selective laser melting applications, BeamCheck™ Beam Profiling System measures critical beam parameters such as focal spot size, laser power and laser power density at build plane. BeamCheck™ is designed with NIST-traceable power sensor and beam splitter.

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Mechanical Components and Assemblies

Integrating Spheres can measure beams with ±40° divergence.

February 3, 2017

Available in IS-1, 3A-IS and IS-6 models, Integrating Spheres are designed to measure divergent and collimated light sources. Measuring power from 20nW – 20mW for 0.35µm – 1.1µm light sources, IS-1 is 25 mm sphere. 3A-IS is 40mm sphere and measures power from 1W – 3W for light sources from 350nm – 1100nm. Capable of measuring high and low power divergent beams from 20µW to 30W for... Read More

Machinery & Machining Tools, Test & Measuring Instruments

Configurable Control Platform improves operational efficacy.

June 26, 2015

Improving utilization of existing tools and assets, Automation Platform consists of two programmable automation control options; I/O modules for interfacing to any type of sensor, actuator, valve, etc; and Controls Workbench software for configuration, process monitoring, tuning, and data storage. Library of process routine templates and function blocks facilitates implementation, and... Read More

Test & Measuring Instruments

Atmospheric Gas Analyzer detects trace gases.

March 20, 2015

Available in benchtop and rack-mounted models, Cirrus™ 3-XD features patented V-lens™ Ion Optics Technology that eliminates baseline noise associated with effects of metastable neutrals, enabling users to achieve consistently low ppb level detection limits, irrespective of bulk gas present. Quadrupole mass spectrometer-based system incorporates internal oven and capillary inlet design that... Read More

Sensors Monitors & Transducers, Test & Measuring Instruments

All-Stainless Steel Piezo Transducer has 3 setpoint relays.

November 17, 2014

Mountable in any orientation, 902B Absolute Piezo vacuum transducer suits harsh processes and is resistant to damage from air inrush and vibration. Unit integrates electronics and MEMS-based Piezo sensor with metal-sealed, stainless steel 316 diaphragm and provides seamless, gas-independent vacuum pressure measurement from 0.1–1000 Torr. Along with 3 setpoint relays, features... Read More

Sensors Monitors & Transducers, Test & Measuring Instruments

Capacitance Manometer measures from 0.1-1,000 Torr.

February 18, 2014

Internally heated to 45, 80, or 100°C, a-Baratron® Capacitance Manometer provides accurate vacuum and pressure measurements. Unit features pushbutton zero, all-digital architecture, and sensor made from Inconel and Incoloy nickel alloys for corrosion resistance. Unit can be equipped with standard sensor or patented Etch Baffle sensor technology that minimizes process contamination. Fully CE... Read More

Controls & Controllers

Mass Flow Controllers offer multi-gas, multi-range solution.

July 19, 2012

Featuring digital control architecture, P-Series/G-Series MFCs use embedded web browser application for changes in gas type and full scale flow. P-Series models, with full scale ranges from 5 sccm to 240 slm, are suited for critical mass flow applications. With integral pressure transducer, units offer pressure insensitive capabilities that maintain tight flow control in event of upstream... Read More

Sensors Monitors & Transducers, Test & Measuring Instruments

Residual Gas Analyzers support Web-based reporting, control.

May 14, 2012

Quadrupole monitors HPQ3 and HPQ3S are PVD chamber sensors that do not require differential pumping. Able to detect single figure ppm air leaks during PVD process while simultaneously monitoring all gas species in mass range of 1-100 amu, analyzers feature ion source with dual filaments to ensure failure backup and continuous uninterrupted operation. Respectively, HPQ3 and HPQ3S provide data for... Read More

Computer Hardware & Peripherals, Controls & Controllers

Ethernet Control Module allows for dense and mixed I/O.

October 3, 2011

Providing stand-alone process control platform, Model ECM2 offers real-time OS, interlock board for safety I/O, and on-board analytics, from standard SPC to advanced model-based control algorithms. Module mixes analog, digital, temperature, serial, and safety I/O, providing programming via standard programming languages, including Matlab, C++, and Ladder Logic. Processor accelerates communication... Read More

Electrical Equipment & Systems

RF Power Generator suits PV, LED, and MEMS applications.

August 15, 2011

Available in 2U full rack and 3U half rack enclosures, elite(TM) RF Generator comes in power levels of 300, 600, and 750 W. Full rack design eliminates cables and connectors, while inductive clamp technology protects generator from adverse VSWR load conditions. Air-cooled, single phase, 13.56 MHz generator is suited for amorphous thin film solar manufacturing, LED passivation and etch, MEMS, and... Read More

Test & Measuring Instruments

Large Vacuum Chambers are offered in various materials.

October 1, 2010

Custom-built, large vacuum chambers are available as cylindrical chambers of up to 96 in. long with 60 in. dia and as rectangular chambers up to 160 x 120 x 120 in. Fabricated in various materials, including stainless steel, aluminum, Hastelloy®, and Inconel®, they are suited for solar, high energy physics, and industrial coating applications. Products can be supplied as kit with... Read More

Fluid & Gas Flow Equipment

Compact Vacuum Valve is rated for 10,000,000 cycles.

July 21, 2010

Available in angle, inline, and internal-only configurations, High Cycle Valve features stainless steel bellows that prevent outgassing, virtual leaks, and particle entrapment. High flow port sizes include NW25, NW40, and NW50, while TIG fusion welded vacuum grade body ensures less contamination build-up. For leak tight operation, elastomer seals are available in Viton® for typical operating... Read More

Fluid & Gas Flow Equipment

Vacuum Valves withstand harsh semiconductor and solar processes.

July 9, 2010

Available in angle and inline configurations, Corrosion and Ozone Resistant Vacuum Valves utilize patented technology that completely seals off valve bellows, keeping reactive and corrosive gases from contacting and collecting on bellows surface when valve is open. Units come with air solenoid for electro-pneumatic control of valve and limit switch assembly for remote indication in open or closed... Read More

Fluid & Gas Flow Equipment

High Flow Valves feature high conductance design.

July 7, 2010

Offering life of over 1,000,000 cycles, High Flow Valves feature corrosion resistant 304 stainless steel vacuum grade, fusion welded, and beaded blasted body. They can be heated to 185°C to prevent process byproducts from condensing in valve, while edge-welded bellows prevent out-gassing and virtual leaks. Available in sizes NW160 (6 in.), NW200 (8 in.), NW250 (10 in.), and NW320 (12 in.),... Read More

Computer Hardware & Peripherals, Controls & Controllers, Test & Measuring Instruments

Ethernet Control Module features all-in-one design.

April 21, 2010

Featuring high-density design that consolidates I/O units into one location, Ethernet Control Module combines analog, digital, serial, and interlock I/O connections with ability to communicate over multiple protocols. Intelligent programmability allows unit to run multiple defined sequences simultaneously, modularizing and distributing time-critical tasks close to device. The cLogic(TM) real-time... Read More

Test & Measuring Instruments

Residual Gas Analyzers feature web-enabled design.

October 23, 2009

Featuring optimized electronics platform for data acquisition, Microvision 2 and e-Vision 2 offer stability for e-diagnostic, process monitoring, and general vacuum trouble-shooting applications. Ethernet connectivity enables users to access data from anywhere on TCP-IP network, providing solution to wide-scale multi-RGA installations. RGAs are available with variety of software control systems,... Read More

Waste Management & Waste Handling Equipment

Ozone Injection System provides water loop sanitization.

October 14, 2009

Designed for pharmaceutical and high purity water systems, LIQUOZON® Ultra turn-key automated ozone injection system generates ozone, dissolves it into water, and delivers degassed and bubble-free ozone-enriched water. System is equipped with flow rate and ozone concentration controllers, ozone safety monitors, control panel with recorder to monitor quality, with optional TOC meter. Compact,... Read More

Test & Measuring Instruments

DAQ System offers quality monitoring for injection molding.

June 11, 2009

SenseLink(TM) QM v2.2 features multivariate analysis with partial least squares modeling to optimize quality monitoring and fault detection. Compact unit lets users track multiple quality parameters in real-time, identify product variability and defects, and determine root causes and incorporates multivariate libraries and automated modeling functions. Web browser user interface simplifies... Read More

Materials & Material Processing

Static Neutralizer System suits hazardous locations.

May 15, 2009

Suited for hazardous location printing and coating operations, ION POWER(TM) HL-Type Static Neutralizer controls static charges over range of 8 in. and at web speeds over 2,000 fpm. System facilitates networking of multiple neutralizing stations, protecting equipment, product, and operators. Series 8155 POWER MODULES connect with 8300 COMMUNICATOR modules through 2-wire RS-485 bus to transfer... Read More

Sensors Monitors & Transducers, Test & Measuring Instruments

Transducers measure pressures from atmospheric to 10-8 Torr.

May 8, 2009

Able to be mounted in any orientation, Series 970 Cold Cathode Transducers use up to 4 sensors, including cold cathode, MicroPirani(TM), and Piezo technologies. Providing functionality over wide measurement range, it eliminates need for multiple gauges. They include both analog and digital communication and can be used with PDR900 controller. Three independent relay set points provide process... Read More

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MKS Instruments, Inc.