MKS' ðMFC Low Pressure Mass Flow Controller Wins Editors' Choice Best Product Award

Wilmington, MA, July 9, 2007 - MKS Instruments, Inc. (Nasdaq: MKSI), a leading provider of process control technologies for improving productivity in semiconductor and other advanced manufacturing processes, is pleased to announce it has received the esteemed Editors' Choice Best Product Award, presented annually by Semiconductor International magazine, for the ðMFC Low Pressure Mass Flow Controller. The ðMFC-LP is one of 21 winning products, announced by Semiconductor International for excellence in semiconductor manufacturing.

Designed for maximum utilization of Safe Delivery Source gases used in ion implant applications, the ðMFC-LP offers accurate, precise control of low gas flows over a wide pressure range with source gas delivery pressure as low as 4 Torr and typical response times of less than 2 seconds. Implementation increases source gas utilization, reducing the frequency of source gas cylinder changes, improving tool uptime and COO.

"The ðMFC is the latest in MKS products designed specifically for the SDS® and VAC® source gases serving the ion implantation industry," said Mike Patterson of MKS. "The MFC's multi-gas, multi-range feature allows users to configure it for different primary implant gases such as arsine, phosphine, boron trifluoride and others, keeping inventory costs down. In addition, the patented valve and sensor designs offer exceptional zero stability and accuracy for all flow conditions while maintaining the ability to rapidly achieve setpoint and repeatably control the gas flow."

"Advances in semiconductor technology are continually reshaping the world, and our Editors' Choice Best Product Awards program honors the products that have made those advances possible," said Pete Singer, Editor-in-Chief of Semiconductor International. "Chipmakers rely on such products to make their products smaller, faster and more reliable, with increased functionality. We congratulate the people and companies that have had the insight and fortitude to bring these innovative products to the market."

The magazine will present the awards in a ceremony July 18 at SEMICON® West 2007 in San Francisco.

About MKS

MKS Instruments is a leading worldwide provider of process control solutions for advanced manufacturing processes such as semiconductor device manufacturing and thin-film manufacturing for flat panel displays, optical storage media, architectural glass and electro-optical products. We also provide technology for biopharmaceutical and medical imaging equipment.

Our instruments, components and subsystems incorporate sophisticated technologies to power, measure, control and monitor increasingly complex gas-related semiconductor manufacturing processes, thereby enhancing our customers' uptime, yield and throughput, and improving their productivity and return on invested capital.

About Semiconductor International

Semiconductor International (SI), published by Reed Business Information and a part of Reed Elsevier's global array of information products, is the leading technical publication reaching and covering the global semiconductor manufacturing industry. SI boasts the industry's most experienced full-time technical editorial team, and has the largest circulation to semiconductor manufacturers of any industry publication. Additional information about SI and its many products and activities are available at

Corporate contact:
Lisa Condon
Phone: 978-284-4050
Fax: 978-284-4999

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