MKS Exhibits New Control Solutions at SEMICON West 2007


MKS Instruments, Inc. will exhibit the CONTINUUM(TM) Universal Industrial Network Gateway with cLogic(TM) and the MacroNode(TM) I/O Controller with EtherCAT interface at SEMICON West, July 17-19 in San Francisco. These new solutions offer more precise process control through faster network performance and improved web browser diagnostics. The MKS CONTINUUM quickly connects any serial device to Fieldbus and industrial Ethernet protocols, and includes cLogic technology that enables users to implement custom data translation. The MacroNode I/O now supports EtherCAT, an open real-time network as well as Modbus/ TCPTM, Ethernet/IPTM, and DeviceNet(TM). See both of MKS' new and innovative control solutions at MKS Booth 1720 in the South Hall.

The CONTINUUM network gateway enables communication between RS232 / RS485 devices and control components with DeviceNet or Modbus/TCP. Profibus, Ethernet/IP, EtherCAT and ProfiNet will be supported in continued releases. Its cLogic technology provides simple and rapid integration with components having proprietary communications protocols. The CONTINUUM's web-browser interface simplifies initial configuration, and provides e-diagnostic access and fast debug from remote locations. Its DIN Rail and surface mount options offer flexible installation with existing equipment and enclosures.

The MacroNode I/O with new EtherCAT features sub-msec I/O control for improving process consistency, cLogic distributed real-time logic engine, and up to 96 I/O points over four slots in a compact and economical package. Each I/O card is digital, analog or a combination, and built-in web servers provide graphical user interfaces for setup and diagnostics. The MacroNode I/O product line provides high density, compact and economical I/O solutions with on-board cLogic control to handle distribution of real-time logic tasks.

MKS Instruments, Inc.
SEMICON/West 2007
South Hall, Booth 1720

CONTINUUM(TM), MacroNode(TM) and cLogic(TM) are trademarks of MKS Instruments, Inc., Wilmington, MA.

About MKS
MKS Instruments is a leading worldwide provider of process control solutions for advanced manufacturing processes such as semiconductor device manufacturing and thin-film manufacturing for flat panel displays, optical storage media, architectural glass and electro-optical products. We also provide technology for biopharmaceutical and medical imaging equipment.

Our instruments, components and subsystems incorporate sophisticated technologies to power, measure, control and monitor increasingly complex gas-related semiconductor manufacturing processes, thereby enhancing our customers' uptime, yield and throughput, and improving their productivity and return on invested capital.

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