Atomic Force Microscope supports multiple stages for versatility.

Press Release Summary:

Along with fully addressable and programmable 200 x 200 mm stage and stage adapter for imaging small samples, 5600LS supports 300 x 300 mm stage for handling larger semiconductor wafer samples and multisample 2 in. wafer stage suited for research involving optoelectronics and LEDs. Motorized stage accommodates single sample up to 200 mm dia x 30 mm tall or up to 9 small samples with 200 mm vacuum chuck; probes are positioned to image and map specimens with 0.5 µm precision.

Original Press Release:

Agilent Technologies Enhances Application Versatility of Atomic Force Microscope for Studying Large and Small Samples


Agilent Technologies Inc. (NYSE: A) today announced the availability of 300 mm x 300 mm and multisample two-inch-wafer stages for its large-stage 5600LS atomic force microscope. These new stages extend the application versatility of the Agilent 5600LS AFM, which also offers the largest fully addressable and programmable 200 mm x 200 mm stage, plus a special stage adapter for imaging small samples.

"With its expanded selection of stages, the modular 5600LS provides researchers an ideal tool for semiconductor, optoelectronics, materials science and life science studies at the nanoscale," said Jeff Jones, general manager for Agilent's nanoinstrumentation facility in Chandler, Ariz. "The 5600LS is the world's finest commercially available AFM that permits imaging of both large samples [in air] and small samples [in air, or in liquid under temperature control]."

The 5600LS system's programmable, motorized stage quickly and accurately positions probes to image and map specimens with 0.5µm precision. Investigators can locate and identify an area of interest and, with the coordinates stored, automatically reposition the sample for further study. Multiple locations can be programmed. The stage easily accommodates either a single sample up to 200 mm in diameter and 30 mm tall or as many as nine small samples with the 200 mm vacuum chuck (more can be held with tape), each of whose locations can be programmed.

The new 300 mm x 300 mm stage allows 5600LS users to handle larger semiconductor wafer samples. Alternatively, the new multisample, two-inch-wafer stage is perfect for research involving optoelectronics and LEDs.

The 5600LS is compatible with all standard imaging modes and with Agilent's unique scanning microwave microscopy (SMM) mode, which combines the compound, calibrated electrical measurement capabilities of a microwave vector network analyzer with the outstanding spatial resolution of an atomic force microscope. SMM mode is particularly useful for testing and characterizing semiconductors. It can be used to measure complex impedance (resistance and reactance) as well as calibrated capacitance and dopant density.

A high-resolution image of the Agilent 5600LS AFM is available at

AFM Instrumentation from Agilent

Agilent offers high-precision, modular AFM solutions for research, industry and education. Worldwide support is provided by experienced application scientists and technical service personnel. Agilent's leading-edge R&D laboratories are dedicated to the timely introduction and optimization of innovative and easy-to-use AFM technologies.

About Agilent Technologies

Agilent Technologies Inc. (NYSE: A) is the world's premier measurement company and a technology leader in chemical analysis, life sciences, diagnostics, electronics, and communications. The company's 20,500 employees serve customers in more than 100 countries. Agilent had revenues of $6.9 billion in fiscal 2012. Information about Agilent is available at


Janet Smith, Americas

+1 970 679 5397

Twitter: @JSmithAgilent

Joan Horwitz, nanomeasurement

+1 480 756 5905

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