New Products and Services from BOC Edwards at Semicon® West 2006

SAN FRANCISCO, CALIF. (10 July 2006)- BOC Edwards, a leading supplier of vacuum, abatement, chemical management equipment and services to the world's semiconductor OEMs and fabs, announced today that it will showcase several new systems and services at SEMICON® West 2006, July 11 - 13, 2006, at the Moscone Center (booth 726).

New Systems
BOC Edwards offers the iTCU 40/90 single-channel temperature control unit (chiller) to address the needs of advanced semiconductor manufacturing processes for precise temperature stability, auto-tuning to facility conditions, logging of all control parameters, factory connectivity and ease of use. The easily-maintained iTCU 40/90 chiller reliably cools electrostatic chucks, quartz windows and chamber walls. The use of non-conductive perfluorocarbon coolant eliminates the need for resistivity concerns when used with large plasma or magnetic fields.

The STP-XA4503C turbomolecular pump offers the highest performance in the process pressure range of high vacuum to 2,000sccm process flow, with enhanced throughput for all gases. This pump is based on a new platform design offering features to improve thermal management, which enhances performance on harsh processes, increases the maximum process flow capability and reduces the effects of corrosion and deposition. The world leading performance is suited to both light and harsh applications, such as semiconductor etch, implant, lithography and LCD processes.

The new EPX 180 Twin provides a 40 percent improvement in pump down time and improvements in tool throughput. The EPX range of compact, on-tool vacuum dry pumps is designed for clean processes, such as load lock and transfer chambers, and has been widely adopted by leading OEMs. The EPX offers an exceptionally light and compact package and, with over 3000 units shipped, has demonstrated exceptional reliability. Using a unique patented mechanism, the EPX 180 Twin is capable of pumping from atmosphere to ultimate pressures of <10-4 Torr. The EPX 500 has an even lower ultimate pressure of <10-6 Torr and can replace a turbo pump plus dry pump combination.

New Services
BOC Edwards Kachina offers enhanced parts cleaning and kit management services to reduce equipment operating costs and improve yield. These benefits are realized via our selective stripping, metal and ceramic coatings, parts sourcing, refurbishment and kit logistics offerings. BOC Edwards Kachina employs a global operations approach with strategically located hub facilities in the United States, Europe and Asia and on-site support within customer fabs.
Ship-to-Control (S2C) addresses the semiconductor industry's demands for more stringent controls on the levels of key impurities in critical process gases. The S2C program drives product improvements by using more precise statistical control levels, reinforced by an agreed process for material disposition. BOC Edwards views this program as a way to reduce process variation for customers and reduce cost in the material processing and analysis areas.

BOC Edwards, part of The BOC Group plc, is a leading supplier of integrated solutions for the manufacture of microelectronics devices, including semiconductors and flat panel displays. Partnering with fabs, foundries and process tool manufacturers, BOC Edwards provides electronic materials and process-enabling subsystems that are supported by best-in-class operations and maintenance services for its global customer base.

Serving two million customers in more than 50 countries, The BOC Group is one of the largest and most global of the world's leading gases companies. It employs over 30,000 people, with total revenues of £4.6 billion (more than US $8 billion) in 2005. For more than a century, BOC has contributed to advances in many industries and aspects of everyday life, including steel-making, refining, chemical processing, environmental protection, wastewater treatment, welding and cutting, food processing and distribution, glass production, electronics and health care.

Information on the BOC Group can be accessed by visiting the Group web site, Specific information on BOC Edwards can be found at E-mail inquires can be sent to

Company Contact
Andrew Davis
+44 (0) 1293 603507

Agency Contact:
Sandy Fewkes

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