Edwards Vacuum Technology

Turbomolecular Vacuum Pump prevents powder deposition.
Fluid & Gas Flow Equipment

Turbomolecular Vacuum Pump prevents powder deposition.

Pairing rotor with iXA Series on-board controller, Model STP-iXA4506 maximizes allowable gas throughput for high-flow processes. Absence of mechanical bearings virtually eliminates periodic maintenance. Operating at speeds up to 4,300 l/s N2 with throughput up to 4,330 sccm N2, pump is suitable for semiconductor etch, LCD etch, glass coating, solar PVD, and coating PVD applications. When needed,...

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Dry Screw Vacuum Pumps handle large gas volumes.
Fluid & Gas Flow Equipment

Dry Screw Vacuum Pumps handle large gas volumes.

With ultimate vacuum typically down to 3.8 x 10-4 Torr without purge, Models GXS450 and GXS750 deliver peak pumping speeds up to 435 cfm. When combined with booster pump, units offer speeds up to 1,978 cfm. Pump mechanism can be cleaned using high flow purge and solvent flush accessory, which removes need to partially strip pump. Fitted with controller as standard, pumps are suited for steel...

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Fluid & Gas Flow Equipment

Dry Vacuum Pumps feature tapered screw technology.

Suited for liquid and solids handling in chemical, petrochemical, and pharmaceutical processes, CXS Pumps offer vacuum down to 10-3 mbar with no contamination of process stream or cooling water and no effluent generation. Tapered screw technology gives smooth, gradual compression along length of rotor for optimized pumping at all inlet pressures. Independently certified for hazardous...

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Dry Screw Vacuum Pumps are virtually maintenance-free.
Fluid & Gas Flow Equipment

Dry Screw Vacuum Pumps are virtually maintenance-free.

Providing vacuum down to 1 x 10-3 mbar, GXS Series features service life up to 5 years, even in harsh applications. Pump mechanism can be cleaned using high flow purge and solvent flush accessory, eliminating need to partially strip pump. Shafts are supported at both ends, resulting in optimized dust handling, minimized vibration, and noise levels below 64 dB(A). Applications include lamination,...

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Edwards Wins Order for Chemical Dry Pumps
Fluid & Gas Flow Equipment

Edwards Wins Order for Chemical Dry Pumps

TEWKSBURY, MA (12th April 2010) Leading manufacturer of vacuum equipment Edwards has won an order to supply an EDP400 chemical dry pump system to CABB AG, which produces fine chemicals for the agrochemical and pharmaceutical industries. CABB AG required a reliable pump for use in a highly corrosive reaction application. After an in-depth evaluation CABB chose Edwards' EDP400 system because it...

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Exhaust Management Systems use vacuum and abatement technologies.
Computer Hardware & Peripherals

Exhaust Management Systems use vacuum and abatement technologies.

Incorporating iXH harsh process vacuum pump and Atlas(TM) gas abatement solutions, Zenith(TM) series helps address vacuum and abatement demands for advanced semiconductor processing at 60 nm and smaller design rules. It offers range of turnkey, process-centric exhaust management solutions for semiconductor manufacturing. Featuring completely integrated components, product range provides full...

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Edwards Delivers Vacuum Carts to Diamond Light Source
Fluid & Gas Flow Equipment

Edwards Delivers Vacuum Carts to Diamond Light Source

TEWKSBURY, MA (19 November 2009) - Leading vacuum technology company Edwards has designed and delivered 14 bespoke vacuum carts to the UK's national synchrotron, Diamond Light Source, on the Harwell Science and Innovation Campus, Oxfordshire, which is currently the world's brightest medium-energy source. The carts provide mobile high vacuum pumping stations for the synchrotron's beamlines to help...

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Abatement System suits solar cell, flat panel manufacturing.
Fluid & Gas Flow Equipment

Abatement System suits solar cell, flat panel manufacturing.

Featuring integrated wet scrubbing system, Spectra ZW is used for abating deposition and clean gases used in high gas flow chemical vapor deposition process steps in solar and flat panel manufacturing. High-flow particulate and acid gas capture and processing are provided in one standalone system, which can also be integrated into Zenith for custom-built abatement and vacuum pump design. Greater...

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Acoustic Enclosure Reduces Noise Level by up to Seven Decibels
Architectural & Civil Engineering Products

Acoustic Enclosure Reduces Noise Level by up to Seven Decibels

TEWKSBURY, MA (4 June 2009) Edwards, leading vacuum equipment manufacturer for the scientific industries, has launched a new competitively priced acoustic enclosure for its popular EM and RV rotary vane pumps. The enclosure reduces the noise level of each pump by up to seven dBA, enabling scientists to work in a significantly quieter environment. The enclosure incorporates an acoustic foam lining...

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Company News

Edwards Responds to United Nations' New Greenhouse Gas Guidelines

More stringent IPCC guidelines include accounting for CF4 by-product formation and emissions. Burgess Hill, West Sussex, U.K. (29 May 2019) – The Intergovernmental Panel on Climate Change (IPCC), the United Nations’ body for assessing the science related to climate change, has just released the latest refinement to its 2006 Guidelines. As part of an effort to tackle climate change, the...

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Company News

Latest Abatement System Installation Marks a Milestone of Success for Edwards

Edwards now has 10,000 inward fired combustion abatement systems installed in semiconductor fabs worldwide; its abatement solutions have prevented over 14 million tons of carbon dioxide equivalent emissions from being released into the atmosphere in 2017. SAN FRANCISCO – SEMICON West (11 July 2018) – Edwards Vacuum, a leading manufacturer of vacuum and abatement solutions, announces a...

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Company News

Edwards Vacuum Breaks Ground on New High-Technology Innovation Center in Hillsboro

New center is strategically located close to key semiconductor customer sites for enhanced technology collaboration & development HILLSBORO, Ore. (16 April 2018) – Edwards Vacuum, a leading manufacturer of vacuum and abatement solutions, following completion of the purchase of an eight-acre site located on NE Century Boulevard in Hillsboro, Ore., has begun the process of construction for a new...

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Turbomolecular Vacuum Pump prevents powder deposition.
Fluid & Gas Flow Equipment

Turbomolecular Vacuum Pump prevents powder deposition.

Pairing rotor with iXA Series on-board controller, Model STP-iXA4506 maximizes allowable gas throughput for high-flow processes. Absence of mechanical bearings virtually eliminates periodic maintenance. Operating at speeds up to 4,300 l/s N2 with throughput up to 4,330 sccm N2, pump is suitable for semiconductor etch, LCD etch, glass coating, solar PVD, and coating PVD applications. When needed,...

Read More »
Dry Screw Vacuum Pumps handle large gas volumes.
Fluid & Gas Flow Equipment

Dry Screw Vacuum Pumps handle large gas volumes.

With ultimate vacuum typically down to 3.8 x 10-4 Torr without purge, Models GXS450 and GXS750 deliver peak pumping speeds up to 435 cfm. When combined with booster pump, units offer speeds up to 1,978 cfm. Pump mechanism can be cleaned using high flow purge and solvent flush accessory, which removes need to partially strip pump. Fitted with controller as standard, pumps are suited for steel...

Read More »
Fluid & Gas Flow Equipment

Dry Vacuum Pumps feature tapered screw technology.

Suited for liquid and solids handling in chemical, petrochemical, and pharmaceutical processes, CXS Pumps offer vacuum down to 10-3 mbar with no contamination of process stream or cooling water and no effluent generation. Tapered screw technology gives smooth, gradual compression along length of rotor for optimized pumping at all inlet pressures. Independently certified for hazardous...

Read More »
Dry Screw Vacuum Pumps are virtually maintenance-free.
Fluid & Gas Flow Equipment

Dry Screw Vacuum Pumps are virtually maintenance-free.

Providing vacuum down to 1 x 10-3 mbar, GXS Series features service life up to 5 years, even in harsh applications. Pump mechanism can be cleaned using high flow purge and solvent flush accessory, eliminating need to partially strip pump. Shafts are supported at both ends, resulting in optimized dust handling, minimized vibration, and noise levels below 64 dB(A). Applications include lamination,...

Read More »
Edwards Wins Order for Chemical Dry Pumps
Fluid & Gas Flow Equipment

Edwards Wins Order for Chemical Dry Pumps

TEWKSBURY, MA (12th April 2010) Leading manufacturer of vacuum equipment Edwards has won an order to supply an EDP400 chemical dry pump system to CABB AG, which produces fine chemicals for the agrochemical and pharmaceutical industries. CABB AG required a reliable pump for use in a highly corrosive reaction application. After an in-depth evaluation CABB chose Edwards' EDP400 system because it...

Read More »
Exhaust Management Systems use vacuum and abatement technologies.
Computer Hardware & Peripherals

Exhaust Management Systems use vacuum and abatement technologies.

Incorporating iXH harsh process vacuum pump and Atlas(TM) gas abatement solutions, Zenith(TM) series helps address vacuum and abatement demands for advanced semiconductor processing at 60 nm and smaller design rules. It offers range of turnkey, process-centric exhaust management solutions for semiconductor manufacturing. Featuring completely integrated components, product range provides full...

Read More »

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