Edwards Vacuum Technology
Suite 3-101E, Highwood Office Park
Tewksbury, MA 01876
Exhaust Management Systems use vacuum and abatement technologies.
Incorporating iXH harsh process vacuum pump and Atlas(TM) gas abatement solutions, Zenith(TM) series helps address vacuum and abatement demands for advanced semiconductor processing at 60 nm and smaller design rules. It offers range of turnkey, process-centric exhaust management solutions for semiconductor manufacturing. Featuring completely integrated components, product range provides full...
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Turbomolecular Pump targets laboratory vacuum systems.
Combining turbomolecular and drag stages with fluid dynamic stage, EXT406PX allows customers to build compact vacuum systems capable of withstanding high backing pressures even with continuous gas loads at main inlet. It can sustain normal operation at backing pressure of up to 17 mbar and has protection against mains variation on backing pump. System is available in 2 ranges: ISO and CF 160 with...
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BOC Edwards Installs Innovative ERIX Water Treatment System at UAlbany Nanocollege's Albany Nanotech Complex
ERIX recycles scrubber water and improves efficiency of back-pad treatment facilities WILMINGTON, MASS, US. (08 September 2006)- BOC Edwards, a leading supplier of vacuum, abatement, chemical management equipment and services to the world's semiconductor OEMs and fabs, announced today that it has successfully installed its innovative ERIX wastewater treatment system at the College of Nanoscale...
Read More »Evaporation Source is used in OLED and solar cell production.
Offering control of temperature profile and deposition rate, evaporation source is available in 2 sizes with 2 or 4 cc charge capacity. It contains heating element, temperature sensor, and interchangeable crucible and is operated by single- or 4-channel source controller that uses temperature ramps and self-tuning control loops to allow user-defined source temperature profile. Controllers operate...
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Mechanical Boosters offer pump speeds of 4,125-17,700 cfm.
Based on Roots technology, SN Series is manufactured in cast iron with mechanical shaft seal and internal piston ring seals as standard. Depending on model, boosters can be supplied with motors, or variable speed drives and couplings and are available to UL, CSA, or CE Standards. Chemical versions are certified to meet ATEX requirements. Boosters are suited for steel degassing, metallurgy,...
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Dry Vacuum Pump suits harsh industrial applications.
Based on double-ended screw technology, IDX1000 utilizes double-ended design that eliminates axial forces. It has no lubricants under vacuum, resulting in elimination of process contamination within oil or final product. Variable pitch geometry provides staged compression along length of screw, and bearing and gearbox lubrication system uses cooled, filtered oil. With 950 m-³/hr. capacity,...
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Vacuum Coating System suits thin film deposition processes.
Designed for production of substrates used in semiconductor, laser, and scientific industries, custom-built TF600 has 600 mm wide coating chamber with vacuum pumping system in rear. Pumping system options include diffusion, turbomolecular, and cryogenic high vacuum pumps as well as XDS 35i dry scroll pump for backing and chamber roughing. Process options include resistance evaporation, electron...
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Vapor Booster includes clean out port.
Model 18B4 Vacuum Pump runs in conjunction with other vacuum pumps, enabling high throughput. Oil is vaporized at 200-250-
Read More »Modular Dry Pump targets semiconductor processes.
Intended for stringent demands of 300 mm applications, iGX platform is also effective in 200 mm fabs. Active Utility Control feature helps cut utility consumption during idle periods. The iGX provides Ethernet connectivity and web page publishing of key data, as well as comprehensive set of other networking options to assure pump availability.
Read More »Dry Vacuum Pump suits fluorine processes.
Harsh duty, Model iH-F is available in range of peak speeds from 80-1,800 m3h-1. It includes sensing system that detects seal deterioration inside pump, allowing user to operate pump for long periods while maintaining confidence in seal integrity.
Read More »Edwards Responds to United Nations' New Greenhouse Gas Guidelines
More stringent IPCC guidelines include accounting for CF4 by-product formation and emissions. Burgess Hill, West Sussex, U.K. (29 May 2019) – The Intergovernmental Panel on Climate Change (IPCC), the United Nations’ body for assessing the science related to climate change, has just released the latest refinement to its 2006 Guidelines. As part of an effort to tackle climate change, the...
Read More »Latest Abatement System Installation Marks a Milestone of Success for Edwards
Edwards now has 10,000 inward fired combustion abatement systems installed in semiconductor fabs worldwide; its abatement solutions have prevented over 14 million tons of carbon dioxide equivalent emissions from being released into the atmosphere in 2017. SAN FRANCISCO – SEMICON West (11 July 2018) – Edwards Vacuum, a leading manufacturer of vacuum and abatement solutions, announces a...
Read More »Edwards Vacuum Breaks Ground on New High-Technology Innovation Center in Hillsboro
New center is strategically located close to key semiconductor customer sites for enhanced technology collaboration & development HILLSBORO, Ore. (16 April 2018) – Edwards Vacuum, a leading manufacturer of vacuum and abatement solutions, following completion of the purchase of an eight-acre site located on NE Century Boulevard in Hillsboro, Ore., has begun the process of construction for a new...
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Exhaust Management Systems use vacuum and abatement technologies.
Incorporating iXH harsh process vacuum pump and Atlas(TM) gas abatement solutions, Zenith(TM) series helps address vacuum and abatement demands for advanced semiconductor processing at 60 nm and smaller design rules. It offers range of turnkey, process-centric exhaust management solutions for semiconductor manufacturing. Featuring completely integrated components, product range provides full...
Read More »Edwards Hires New Operations and Technology Director, Ron Krisanda
CRAWLEY, WEST SUSSEX, UK. (January 19, 2009)-Edwards, a leading global supplier of vacuum and abatement equipment and services, announced today the appointment of Ron Krisanda as operations and technology director, effective January 15, 2009. Krisanda joins Edwards from Tyco International, where he was president of the Fire and Security business for Europe, Middle East and Africa. Prior to that,...
Read More »New Industrial Service Center, Strongsville, Ohio for Stokes and Edwards Vacuum Pumps
Edwards, the leading manufacturer of vacuum equipment, has expanded its Industrial Service Center located in Strongsville, Ohio. This has been part of the company's commitment to continuously improve upon customer service, and expand support for its popular Stokes Microvac product line. The modern facility has the capacity to service the full range of Stokes and Edwards vacuum pumps, as well as...
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Turbomolecular Pump targets laboratory vacuum systems.
Combining turbomolecular and drag stages with fluid dynamic stage, EXT406PX allows customers to build compact vacuum systems capable of withstanding high backing pressures even with continuous gas loads at main inlet. It can sustain normal operation at backing pressure of up to 17 mbar and has protection against mains variation on backing pump. System is available in 2 ranges: ISO and CF 160 with...
Read More »Edwards Announces Sale of Kachina Division to Applied Materials
Wilmington, Mass., Aug 28 - BOC Edwards, Inc. has signed a definitive agreement under which Edwards will divest the majority of its parts cleaning and chamber process kit management division, Kachina, to Applied Materials, Inc. (Nasdaq: AMAT) subject to a number of closing conditions. Applied Materials will acquire the assets and operations of the Kachina parts cleaning hub facilities in Arizona,...
Read More »BOC Edwards Marks 2000th IGX Dry Pump Milestone Sale
WILMINGTON, MASS (16 October 2006)- BOC Edwards, a leading supplier of vacuum, abatement, chemical management equipment and services to the world's semiconductor OEMs and fabs, announced today that it has sold its 2000th iGX pump. This is a major milestone for the product line; it confirms the product's position as the de facto dry pump standard within the semiconductor industry for clean to...
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BOC Edwards Installs Innovative ERIX Water Treatment System at UAlbany Nanocollege's Albany Nanotech Complex
ERIX recycles scrubber water and improves efficiency of back-pad treatment facilities WILMINGTON, MASS, US. (08 September 2006)- BOC Edwards, a leading supplier of vacuum, abatement, chemical management equipment and services to the world's semiconductor OEMs and fabs, announced today that it has successfully installed its innovative ERIX wastewater treatment system at the College of Nanoscale...
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