Brooks Automation Inc.

15 Elizabeth Dr.
Chelmsford, MA 01824

Load Port lets OEMs meet end-user 300 mm requirements.

FIXLOAD(TM) 6M load port offers fast wafer-access time and load port-to-FOUP interoperability. It is fully compliant to relevant SEMI standards and is completely backward compatible. Optional single connector interface provides communication to E84, carrier ID, and FixMAP(TM) mapping systems. OEMs can choose between either RS 232 serial, 50 pin digital I/O, Ethernet, or DeviceNet(TM) load...

Software

Software manages engineering changes in semiconductor fabs.

ENGINEERINGworks integrates planning, product, process, and tool data across internal and external manufacturing and engineering supply chains. Its 3-tier Client-Application-Data architecture delivers all content over Web. Users can explore data with data mining and analysis methods to resolve problems with planned and unplanned engineering changes. Software provides reporting, analysis, and...

Software provides web-based analysis.

iProcess allows fab and supervisory personnel to use web browsers inside and outside factory to monitor factory-wide process and tool health. Interface provides drill-down capability into equipment and sensor data for troubleshooting utilizing Brooks' Equipment Engineering Solutions (EES) product line. Graphical reports meet summary data requirements of senior factory management as well as...

Machinery & Machining Tools

Wafer Handling System is optimized for 1-step processes.

InLine Express transfers wafers from EFEM directly into process module without need for central vacuum chamber. It utilizes MagnaTran(TM) 7 robot and FabExpress EFEM for applications such as ash and etch. InLine Express features Express Lock 2 to 3 shelf load lock with built-in high-speed robotic arm. It is eDiagnostics-enabled, and can handle 400 data points every 20 milliseconds. Control system...