Software provides web-based analysis.

Press Release Summary:



iProcess allows fab and supervisory personnel to use web browsers inside and outside factory to monitor factory-wide process and tool health. Interface provides drill-down capability into equipment and sensor data for troubleshooting utilizing Brooks' Equipment Engineering Solutions (EES) product line. Graphical reports meet summary data requirements of senior factory management as well as detailed information needs of process and equipment engineers.



Original Press Release:



Brooks Automation Introduces iProcess(TM) Web-Based Analysis Product



CHELMSFORD, MA December 2001-Brooks Automation, Inc. (NASDAQ: BRKS), a leading supplier of tool and factory hardware and software automation solutions for the global semiconductor industry, announced the release of iProcess(TM) - a new software
product that allows fab and supervisory personnel to use commercially available web browsers both inside and outside the factory to monitor factory-wide process and tool health, enabling faster problem resolution.

"By combining familiar web display technology with powerful analysis tools, iProcess brings a new level of usability to Brooks' data collection and analysis products, which have been industry proven for over 15 years." said Kevin Jackson, vice president and general manager of the Equipment Engineering Solutions (EES) Business Unit of Brooks Automation. iProcess is an easy-to-use interface designed to provide drill-down capability into equipment and sensor data for troubleshooting utilizing Brooks' extensive Equipment Engineering Solutions (EES) product line. This enables engineers of all experience levels to successfully use Brooks' products for equipment maintenance, data analysis, fault detection and classification, run-to-run control, process monitoring, and equipment performance tracking.

iProcess' broad range of graphical reports meet the summary data requirements of senior factory management as well as the detailed information needs of process and equipment engineers. "By making Brooks' EES technology easier to use and more accessible, iProcess enables faster resolution of production problems and an earlier return to optimum operations," said Jackson.

"iProcess is the latest addition to our industry-leading Advanced Process Control (APC) suite," said Jeff Cassis, senior vice president of Brooks Automation. "iProcess enables
our customers to successfully contend with the increasing pressure to improve overall factory efficiency (OFE) by supporting timely and informed decisions on factory
operations."

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