Lin Engineering
Santa Clara, CA 95054
Mar 18, 2005 Suited for commercial grade vacuums up to 10 Torr, Nema size 11, 1.8° vacuum motors in 211 Series employ no-lube stainless steel bearings or special-lube stainless steel bearings depending on rating of vacuum environment. Series measures 1.1 in.² and includes models with 1.24 in. (211-13), 1.75 in. (211-18), and 1.99 in. (211-20) lengths and respective holding torque capabilities to 9.2, 13.7, and 16.6 oz-in.

Nanomotion
Ronkonkoma, NY 11779
Jun 23, 2004 Available from single-element motor that provides .45 kg of force to ark 8-element motor that provides 3.6 kg of force, HR series can drive linear and rotary stages. HR-V vacuum series is rated up to 10-7 torr, and HR-UV is rated up to 10-10 torr. Both configurations are suitable for bake out and operate without any magnetic field. This makes them suited to E-Beam writing and inspection and other processes sensitive to magnetic fields.

Empire Magnetics, Inc.
Rohnert Park, CA 94927 1908
May 04, 2004 Commercial-grade, VC Series Motors survive pressures as low as 10^-6 torr and are available as stepper, hollow-shaft, brushless servo, or rotor nut motors. They are temperature-rated at 130°C internal, and 105°C for case. Bearing lubricant vapor pressure is below 10^-6 torr at 100°C. Applications include metal casting, assemblies welding, and forming operations where motion components are incorporated into molds.

Nanomotion
Ronkonkoma, NY 11779
Jun 18, 2002 HR-V and HR-UV Series piezoelectric motors range in size from single element (providing .45 kg of force) to eight element (providing 3.6 kg of force). Suited for use in vacuum environments, HR motors are capable of driving linear and rotary stages. HR-V vacuum series motors are rated to 10E-7 Torr, and HR-UV motors are rated to 10E-10 Torr. Both configurations are suitable for bake out and operate without any magnetic field.