Vibration Controls & Controllers

Controls & Controllers

Vibration Cancellation System features digital controller.

July 9, 2015

In addition to isolating microlithography, metrology, and inspection equipment in semiconductor factories, STACIS® III Active Piezoelectric Vibration Cancellation System is suited for imaging and process tools used in nanotechnology, photonics, and life sciences. System's DC-2020 controller features dual-core processor with PC-based GUI via point-to-point Ethernet or USB ports. When connecting over Ethernet, DC-2020 creates STACIS GUI in user’s browser with no additional software. Read More

Controls & Controllers

Vibration Cancellation System uses voice coil technology.

February 5, 2015

Integrating serial-type architecture of STACIS® technology with voice coil technology, frame-mountable Stage-Base™ 450 offers vibration and motion cancellation technology for semiconductor tools that incorporate high-precision motorized X-Y stages. Commercial solution provides active floor vibration cancellation starting at 0.6 Hz increasing to 10-to-1 reduction by 2 Hz with voice coil technology. Optional voice coil motors with feed-forward control enable even faster settling time. Read More

Controls & Controllers, Materials & Material Processing

Vibratory Feeder Controller and Line Reactor reduce downtime.

December 22, 2014

Used together or as stand-alone products, REOVIB MFS 268 EtherNet-IP variable-frequency regulator series and CNW 9022 Line Reactor let vibratory feeder users integrate office and lab areas with production operations; enable remote feeder system monitoring/adjustments from one control center; and solve power quality problems. REOVIB MFS 268 is available with DeviceNet, PROFIBUS-DP, or RS232 interfaces, and CNW 9022 provides built-in surge protection to deal with industry-pervasive issues. Read More

Controls & Controllers

Vibration Controllers meet prodution test application needs.

July 11, 2011

Type 7541 and 7542 vibration controllers have dual, parallel A/Ds that deliver 130 dB dynamic range for input channels, without need for programmable voltage range circuitry, which eliminates both signal under-ranges and overloads. Able to operate standalone, buttons on front panel facilitate setup and operation, while LAN interface allows wireless operation and control of multiple devices. Type 7542 offers up to 64 input channels while Type 7541 suits applications requiring 2-4 input channels. Read More

Controls & Controllers

Vibration Control System facilitates basic photonic research.

June 16, 2011

Available with 6, 8, or 12 in. thick steel honeycomb damped optical platform, Integrity VCS Series is suited for photonic research and development at universities, government, or corporate labs. All platforms feature array of tapped holes, ¼-20 or M6, that extend to ½ in. from edges and include sealed design to prevent core contamination. Mating support frame, offered with or without active leveling pneumatic isolators, has welded tubular steel uprights and 3 reinforced safety tie bars. Read More

Controls & Controllers

Vibration Isolation System is frame mountable.

July 20, 2009

Hard-mount active vibration cancellation system, STACIS® FM is designed to control building floor vibrations in semiconductor manufacturing facilities. Unit features extended stroke piezoelectric actuators and hard-mount suspension with no soft air springs. It is available in either 3 or 6 degrees of freedom and starts to isolate below 1 Hz. Stacis technology allows fast settling of isolated payload in response to motorized, stage-induced motion, resulting in increased tool throughput. Read More

Controls & Controllers

Vibration Cancellation System is compact and lightweight.

July 7, 2008

Suited for small precision instruments, particularly those instruments in buildings where floor vibration is severe, TableTop PZT(TM) is active hard-mount bench-top vibration cancellation system that has up to 300 lb payload capacity. Incorporating STACIS® technology, it features extended stroke piezoelectric actuators and both vertical and horizontal sub-Hz vibration cancellation, and has no soft air suspension. Read More

Material Handling & Storage, Controls & Controllers

Vibration-Free Platforms provide portable vibration control.

November 12, 2004

Available with or without mounting holes, BenchMate Series 2200 offers 4 table sizes up to 24 x 36 in. with capacities to 450 lb. Model 2210 features vertical vibration control and uses passive-air design that can be operated with optional hand pump. Model 2212 offers vertical vibration control, but uses self-leveling, active-air unit. Model 2214 offers multistage horizontal isolation feature in addition to vertical vibration control and uses self-leveling, active-air unit. Read More

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