Vibration Controls & Controllers

Controls & Controllers

Vibration Cancellation System features digital controller.

July 9, 2015

In addition to isolating microlithography, metrology, and inspection equipment in semiconductor factories, STACIS® III Active Piezoelectric Vibration Cancellation System is suited for imaging and process tools used in nanotechnology, photonics, and life sciences. System's DC-2020 controller features dual-core processor with PC-based GUI via point-to-point Ethernet or USB ports. When connecting over Ethernet, DC-2020 creates STACIS GUI in user’s browser with no additional software. Read More

Controls & Controllers

Vibration Cancellation System uses voice coil technology.

February 5, 2015

Integrating serial-type architecture of STACIS® technology with voice coil technology, frame-mountable Stage-Base™ 450 offers vibration and motion cancellation technology for semiconductor tools that incorporate high-precision motorized X-Y stages. Commercial solution provides active floor vibration cancellation starting at 0.6 Hz increasing to 10-to-1 reduction by 2 Hz with voice coil technology. Optional voice coil motors with feed-forward control enable even faster settling time. Read More

Controls & Controllers, Materials & Material Processing

Vibratory Feeder Controller and Line Reactor reduce downtime.

December 22, 2014

Used together or as stand-alone products, REOVIB MFS 268 EtherNet-IP variable-frequency regulator series and CNW 9022 Line Reactor let vibratory feeder users integrate office and lab areas with production operations; enable remote feeder system monitoring/adjustments from one control center; and solve power quality problems. REOVIB MFS 268 is available with DeviceNet, PROFIBUS-DP, or RS232 interfaces, and CNW 9022 provides built-in surge protection to deal with industry-pervasive issues. Read More

Controls & Controllers

Vibration Controllers meet prodution test application needs.

July 11, 2011

Type 7541 and 7542 vibration controllers have dual, parallel A/Ds that deliver 130 dB dynamic range for input channels, without need for programmable voltage range circuitry, which eliminates both signal under-ranges and overloads. Able to operate standalone, buttons on front panel facilitate setup and operation, while LAN interface allows wireless operation and control of multiple devices. Type 7542 offers up to 64 input channels while Type 7541 suits applications requiring 2-4 input channels. Read More

Controls & Controllers

Vibration Control System facilitates basic photonic research.

June 16, 2011

Available with 6, 8, or 12 in. thick steel honeycomb damped optical platform, Integrity VCS Series is suited for photonic research and development at universities, government, or corporate labs. All platforms feature array of tapped holes, ¼-20 or M6, that extend to ½ in. from edges and include sealed design to prevent core contamination. Mating support frame, offered with or without active leveling pneumatic isolators, has welded tubular steel uprights and 3 reinforced safety tie bars. Read More

Material Handling & Storage, Controls & Controllers, Mounting & Attaching Products, Fasteners & Hardware

Air Springs isolate vibration for low-frequency machines.

March 8, 2010

Metric isolators of V11Z48MPSB... Series are maintenance-free air spring vibration mounts that use elasticity of air as isolator, which acts as soft spring. Products have no moving parts and can handle range of loads by changing inner air pressure. They can also be used as actuators in tensioning devices. While bellows are made of synthetic rubber that incorporates reinforced cord and wire, clamping rings and upper/lower plates are of stainless steel. Read More

Controls & Controllers

Vibration Isolation System supports optical tables.

February 2, 2010

STACIS® iX LaserTable-Base(TM) consists of 2 vibration isolation systems: STACIS® active piezoelectric vibration cancellation on floor, and pneumatic stacked on top, supporting optical top. Active vibration isolation system incorporates piezoelectric actuators and inertial vibration sensors to cancel vibration at very low frequencies. Product is suited for applications such as interferometry, single- and multi-photon microscopy, and scanning probe microscopy. Read More

Controls & Controllers

Vibration Isolation System is frame mountable.

July 20, 2009

Hard-mount active vibration cancellation system, STACIS® FM is designed to control building floor vibrations in semiconductor manufacturing facilities. Unit features extended stroke piezoelectric actuators and hard-mount suspension with no soft air springs. It is available in either 3 or 6 degrees of freedom and starts to isolate below 1 Hz. Stacis technology allows fast settling of isolated payload in response to motorized, stage-induced motion, resulting in increased tool throughput. Read More

Controls & Controllers

Vibration Cancellation Floor stabilizes SEMs.

June 10, 2009

Designed for use with scanning electron microscopes (SEMs), STACIS® FP active hard-mount vibration cancellation floor platform features extended stroke piezoelectric actuators and damped, powder-coated steel plates that sandwich 4 isolators and digital controller. Measuring 7 in. tall, it weighs less than 400 lb and can support up to 2,500 lb. or more with no soft air suspension. With vibration cancellation starting below 1 Hz, platform is available with 3 or 6 degrees of freedom. Read More

Controls & Controllers

Vibration Cancellation System is compact and lightweight.

July 7, 2008

Suited for small precision instruments, particularly those instruments in buildings where floor vibration is severe, TableTop PZT(TM) is active hard-mount bench-top vibration cancellation system that has up to 300 lb payload capacity. Incorporating STACIS® technology, it features extended stroke piezoelectric actuators and both vertical and horizontal sub-Hz vibration cancellation, and has no soft air suspension. Read More

Controls & Controllers

Active Vibration Cancellation System is designed for SEMs.

August 16, 2007

Available with 3 or 6 degrees of freedom, FloorPlatform PZT(TM) offers sub-Hz vibration cancellation in active hard-mount floor platform that fits scanning electron microscopes (SEMs). System has no soft air suspension, incorporates Stacis® technology, and supports 900-1,600 lb. Other features include extended stroke piezoelectric actuators and damped, powder-coated steel plates that sandwich 4 isolators and DC 2000 digital controller. Read More

Material Handling & Storage, Controls & Controllers

Vibration Isolator is designed for semiconductor tools.

July 30, 2007

Available in 3 DOF or 6 DOF, Electro-Damp® PZT provides semiconductor manufacturers with active inertial vibration cancellation system. Frame-mountable, stiff unit features extended stroke piezoelectric actuators, settling time optimized to respond to stage motion, and no soft air suspension. Also suited for use in microlithography, inspection, and metrology tools, product design facilitates installation with no feedforward required. Read More

Material Handling & Storage, Controls & Controllers

Vibration Isolation Mounts are custom engineered.

August 11, 2006

Customized Vibration Isolation Mounts offer ambient vibration isolation with low natural frequencies, automatic leveling, height control to within 0.005 in., and include internal damping for stability. Standard finish is blue polyurethane, providing Class 100 cleanroom compatibility. Available in active and slave configurations, with load capacities ranging from 200-20,000 lb, units can be manufactured vacuum-compatible, nonmagnetic, and with specialty materials. Read More

Safety & Security Equipment, Material Handling & Storage, Controls & Controllers

Dampening Material helps reduce sound and vibration.

May 8, 2006

Designed to reduce sound, acoustic signatures, and vibration generated by heavy maritime and industrial machinery, Attenuate has environmentally friendly formulation and is fabricated in sheet samples up to 3 ft x 3 ft x 1 in. Material may also be provided in larger, custom sizes in sheets as thin as 1/16 in. To accommodate existing equipment and specifications, it can be can be molded into 3D shapes. Read More

Material Handling & Storage, Controls & Controllers

Vibration Isolation Workstation has 650 lb max capacity.

April 10, 2006

Offering Class 100 cleanroom-compatibility, MK26 utilizes Minus K® negative-stiffness vibration isolators and comes with 30 x 36 in. or 36 x 48 in. tabletop in honeycomb or composite construction. Unit can be customized for various applications where external vibrations would adversely affect operation of sensitive equipment. Adjusted to ½ Hz natural frequency, workstation achieves 93% isolation efficiency at 2 Hz, 99% at 5 Hz, and 99.7% at 10 Hz. Read More

Material Handling & Storage, Controls & Controllers

Benchtop Platform provides active vibration isolation.

August 18, 2005

Series 8001 features microprocessor that uses feedback to sense vibrations and provide immediate responses to eliminate them. Rapidly adjusting to different loads without user intervention, unit dynamically isolates all 6 translational and rotational modes of vibration and actively damps vibrations from 1.0-1,000 Hz. Available in 4 sizes from 16 x 18 x 3.25 in. to 24 x 31 x 5.25 in., portable platform offers load capacities from 330-600 lb. Read More

Material Handling & Storage, Controls & Controllers

Vibration-Free Platforms provide portable vibration control.

November 12, 2004

Available with or without mounting holes, BenchMate Series 2200 offers 4 table sizes up to 24 x 36 in. with capacities to 450 lb. Model 2210 features vertical vibration control and uses passive-air design that can be operated with optional hand pump. Model 2212 offers vertical vibration control, but uses self-leveling, active-air unit. Model 2214 offers multistage horizontal isolation feature in addition to vertical vibration control and uses self-leveling, active-air unit. Read More

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