Mykrolis
Billerica, MA 01821
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Manifold uses dual transducers for online monitoring.
Designed for low-flow point-of-use CMP applications, SolarisÃ-® DVP Dual Transducer Manifold uses disposable methods of reducing defect-causing particles, gels, and agglomerates while simultaneously allowing critical working particles to pass through and reach wafer. It offers clean, safe filter changeout in seconds without use of tools and integrates upstream and downstream pressure...
Read More »Membrane Disk minimizes chemical waste.
OptimizerÃ-® C47 enables R and D evaluation of membrane technology for photoresist and chemical filtration on laboratory scale using small volumes of chemicals. Accommodating variety of membranes, including hydrophobic and hydrophilic special clean membranes for applications requiring lower organic content, C47 enables rapid filtration testing and speeds time to production.
Read More »Vacuum Gauges offer accuracy to 0.25% of reading.
Offered in full-scale ranges from 10-1,000 Torr, XacTorrÃ-® CMC Series Capacitance Diaphragm Gauges provide total pressure measurement independent of gas composition. Units incorporate thermally balanced mechanical structure, physical strain isolation, and sensor shielding. They offer upgrade for smaller form-factor gauges and alternative to full-sized unheated gauges.
Read More »Cartridge Filters suit aqueous-based chemical applications.
QuickChangeÃ-® ATM 0.035 Ã-µm and 0.055 Ã-µm filters feature non-dewetting membrane technology. Large surface area allows high flow rates, facilitating recirculation and recovery of chemical baths. ChemlockÃ-® feature permits safe, rapid change-out with little handling and mess. Shipped water-wet, all-TeflonÃ-® filters withstand high-temperature applications up to 180Ã-
Read More »Mykrolis Wins Two Gassy Awards - Gases & Technology's 2nd Annual Product Innovation Awards - During SEMICON West 2005
BILLERICA, Mass., July 15 /PRNewswire-FirstCall/ -- Mykrolis Corporation (NYSE:MYK), a leading supplier of components and subsystems to the semiconductor industry, today announced it is the recipient of two Gases & Technology Product Innovation Awards. Mykrolis's SolidSense(R) II pressure transducer and IntelliFlow(R) 3XP mass flow controller were recognized for their creative advancement and...
Read More »Manifold uses dual transducers for online monitoring.
Designed for low-flow point-of-use CMP applications, SolarisÃ-® DVP Dual Transducer Manifold uses disposable methods of reducing defect-causing particles, gels, and agglomerates while simultaneously allowing critical working particles to pass through and reach wafer. It offers clean, safe filter changeout in seconds without use of tools and integrates upstream and downstream pressure...
Read More »Membrane Disk minimizes chemical waste.
OptimizerÃ-® C47 enables R and D evaluation of membrane technology for photoresist and chemical filtration on laboratory scale using small volumes of chemicals. Accommodating variety of membranes, including hydrophobic and hydrophilic special clean membranes for applications requiring lower organic content, C47 enables rapid filtration testing and speeds time to production.
Read More »Vacuum Gauges offer accuracy to 0.25% of reading.
Offered in full-scale ranges from 10-1,000 Torr, XacTorrÃ-® CMC Series Capacitance Diaphragm Gauges provide total pressure measurement independent of gas composition. Units incorporate thermally balanced mechanical structure, physical strain isolation, and sensor shielding. They offer upgrade for smaller form-factor gauges and alternative to full-sized unheated gauges.
Read More »Cartridge Filters suit aqueous-based chemical applications.
QuickChangeÃ-® ATM 0.035 Ã-µm and 0.055 Ã-µm filters feature non-dewetting membrane technology. Large surface area allows high flow rates, facilitating recirculation and recovery of chemical baths. ChemlockÃ-® feature permits safe, rapid change-out with little handling and mess. Shipped water-wet, all-TeflonÃ-® filters withstand high-temperature applications up to 180Ã-
Read More »