Vacuum Gauges offer accuracy to 0.25% of reading.
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Press Release Summary:
Offered in full-scale ranges from 10-1,000 Torr, XacTorr® CMC Series Capacitance Diaphragm Gauges provide total pressure measurement independent of gas composition. Units incorporate thermally balanced mechanical structure, physical strain isolation, and sensor shielding. They offer upgrade for smaller form-factor gauges and alternative to full-sized unheated gauges.
Original Press Release:
Mykrolis Introduces XacTorr(R) CMC Series Vacuum Gauges
XacTorr CMC Delivers High Performance Vacuum Measurement in a Compact Design Less Than Half the Size of Traditional Gauges
BILLERICA, Mass., July 11 -- Mykrolis Corporation, a leading supplier of components and subsystems to the semiconductor industry, today announced the release of the XacTorr CMC series of compact capacitance diaphragm gauges (CDGs) for vacuum processes that provide accurate total pressure measurement independent of gas composition.
The XacTorr CMC series incorporates a unique combination of technologies that include a thermally balanced mechanical structure, physical strain isolation and sensor shielding for optimal short-term repeatability and long- term stability. In addition, the XacTorr CMC offers accuracy to 0.25% of reading for more demanding applications.
According to Shaun Pewsey, senior product manager at Mykrolis Corp., "The XacTorr CMC Series is a high performance, cost effective solution for unheated gauge applications. Its compact layout, unique design and high accuracy make the XacTorr CMC an ideal alternative to larger, premium unheated gauges and facilitates easy installation and retrofit replacement."
The XacTorr CMC Series is available in full-scale ranges from 10 Torr to 1000 Torr and is a perfect upgrade for smaller form-factor CDGs and an economical alternative to full sized unheated CDGs.
About Mykrolis
Mykrolis is a worldwide developer, manufacturer and supplier of liquid and gas delivery systems, components and consumables used to precisely measure, deliver, control and purify the process liquids, gases and chemicals, as well as the deionized water, photoresists and vacuum systems utilized in the semiconductor manufacturing process. In addition, the Company's products are used to manufacture a range of other products, such as flat panel displays, high purity chemicals, photoresists, solar cells, gas lasers, optical disks and fiber optic cables. Based in Billerica, Massachusetts, Mykrolis is formerly Millipore Microelectronics, Inc. For more information, visit www.mykrolis.com/ .
Mykrolis and XacTorr are registered trademarks of Mykrolis Corporation.
