Flow Controllers

Flow Controllers

Flow Controller facilitates chemical blending.

Model NT® Integrated Flow Controller helps semiconductor equipment makers enable chemical handling and blending as close to point of use as possible. DeviceNet(TM) communications protocol delivers diagnostics for monitoring, trouble-shooting, and problem-solving, helping to keep fabs up and running.

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Flow Controllers

Pressure-Insensitive MFC uses NeuralStep control technology.

Featuring multi-gas, multi-range functionality, Aera® PI-980(TM) series helps improve processes for etch, CVD, PVD, and diffusion in semiconductor applications. Mass flow controller (MFC) promotes gas-flow stability and provides real-time process control. Combining NeuralStep(TM) control technology with integrated pressure transducer, series increases speed of MFC response, eliminating...

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Flow Controllers

VAV Controller helps maintain tight flow accuracies.

TALON Predator Single Duct/Dual Duct Low Flow Controller is suited for flow ranges between 150-1,200 fpm, with tightest accuracy below 400 fpm. It provides quiet operation to eliminate occupant white noise. Variable air volume controller is suited for critical environments in hospitals, laboratories, industrial buildings, and medical offices where highly accurate building control is required.

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Mass Flow Controller Module is Internet-ready.
Flow Controllers

Mass Flow Controller Module is Internet-ready.

Universal Mass Flow Control System allows user to monitor 4 flowmeters or flow controllers from anywhere Internet-connected PC is available. Each flowmeter channel features totalizer and dedicated alarm, and there are 2 dedicated relay outputs per controller. Batch control program allows execution of up to 16 steps in batch process, while flow control program directs flow control through...

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Flow Controllers

Flow Control Module is Internet-ready.

Universal Module allows users to monitor up to 4 flowmeters or flow controllers from anywhere with Internet-connected PC. Controllers are connected using 0-5 Vdc output. Batch control program allows for execution of up to 16 steps in batch process, while flow control program directs flow control through user-defined series of up to 96 steps. All features can be programmed through integrated...

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Process Control monitors air usage of atomizers.
Flow Controllers

Process Control monitors air usage of atomizers.

Utilizing closed-loop module, AirTronic provides continuous, precise monitoring and control of air volume set points for rotary atomizers, air atomizers, and powder pumps. It accommodates independent and slave modes by incorporating 2 channels per module and 2 modes of operation. AirTronic provides production monitoring through standard lpm display units at module or remote location. It offers...

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Air Volume Controller responds to supply air temperature.
Flow Controllers

Air Volume Controller responds to supply air temperature.

TALON® Predator® Variable Air Volume controller features thermal control sequence that automatically adjusts air flow to maintain cooling as supply air temperature changes. It facilitates DX cooling zone control by eliminating room temperature disturbance due to frequent cycling of DX systems. Varying supply temperature causes adjustment of air flow rate in response to supply...

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Multiple Protocol Controller suits critical environments.
Flow Controllers

Multiple Protocol Controller suits critical environments.

With 25 Â-µsec scan rate, 1 Mb Flash memory, and 1 Mb RAM, microprocessor-based Envirotrak® IV controls equipment and processes used to maintain room temperature, pressure, humidity, airflow, or any combination of the above. It supports BACnet, Modbus, LonWorks, and N2 protocols and incorporates up to 48 I/O control points. Product may be programmed to scan each individual point in any...

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Flow Controllers

Mass Flow Controllers target plasma process environments.

Area® Transformer(TM) digital, multi-gas, multi-range MFCs provide field programmability to run any gas for any gas flow range from 10 sccm to 30 slm. As few as 8 different models can be used to support fab's requirements. Units allow unlimited gas selection without recalibration and can be pulled directly from customer's inventory shelf and programmed to meet requirements.

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Coriolis Mass-Flow Controller suits critical applications.
Flow Controllers

Coriolis Mass-Flow Controller suits critical applications.

Capable of controlling liquids and gases, Brooks Instrument QUANTIM Coriolis meter and controller utilizes modular hardware platform using sensing tube geometries and optical sensing techniques. Modular hardware platform allows product to measure and control flows from 1-28,000 g/hr. Equipped with integrated sensor, transmitter, valve, and control electronics, unit allows users to control liquids...

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