Wafer Processor achieves throughputs up to 180 wafers/hr.
Press Release Summary:
Single wafer wet processor, Model SSEC 3308, can be optimized for parallel processing or complex serial recipes. Eight process modules may be configured in any combination of application-specific double-sided clean, wet etch, or strip processing configurations. Wafers can be handled cassette-to-cassette, or in 300 mm FOUPs or 200 mm SMIF pods. All mechanisms are fully sealed for Class 1 operation, and all processing parameters are PC controlled.
Original Press Release:
Multi-module Processor Achieves High Wafer Throughput
Horsham, PA-The SSEC 3308 single wafer wet processor, manufactured by Solid State Equipment Corporation, achieves wafer throughputs up to 180 wafers per hour in a small footprint. Eight process modules may be configured in any combination of application-specific double-sided clean, wet etch, or strip processing configurations. Wafers can be handled cassette-to-cassette, or in 300 mm FOUPs or 200 mm SMIF pods. All mechanisms, including robotics with edge grippers, are fully sealed for Class 1 operation. The system meets all SEMI® S2-0200 safety and S-8 ergonomic standards, and is CE marked and ETL listed.
SSEC 3308 systems can be optimized for high throughput parallel processing or complex serial recipes. They are based on single-wafer processing, which maximizes cleaning performance and uniformity, while minimizing total cost of ownership. All processing parameters are PC controlled.
Solid State Equipment Corporation manufactures a full line of wet cleaners/processors at its headquarters in suburban Philadelphia. These systems are complemented with application-specific components and supporting systems, including chemistry management systems. SSEC has been developing and manufacturing technology solutions for semiconductor processing for 40 years.
SSEC maintains sales and service offices worldwide, and customer support and process development centers in Horsham, Pennsylvania, Regensburg, Germany, Newcastle, England, Taiwan, R.O.C., Shanghai, P.R.C., and Singapore. For further information, contact Rich Richardson at SSEC, 215-328-0700, FAX 267-965-2841, info@ssecusa.com, or visit www.ssecusa.com.
