Scroll Pump is designed for dry vacuum pumping applications.

Press Release Summary:

Model IDP-3 low noise, low power pump is suited for applications such as analytical instrumentation, high energy physics, semiconductor fabrication, and industrial processing. With hermetic design in which motor and bearings are outside vacuum space, it allows full isolation of all pumped gases and minimizes possibility of catastrophic failures. Measuring 14 x 7 x 6 in., pump has pumping speed of 60 L/m and low base pressure of less than 250 mTorr.

Original Press Release:

Innovative Scroll Pump from Varian, Inc. Delivers a Compact Solution to the Difficult Problem of Dry Vacuum Pumping

LEXINGTON, Mass., June 11 -- Varian, Inc. (NASDAQ:VARI) announced today its new compact, high performance, dry scroll pump. The innovative IDP-3 brings the proven benefits of dry scroll technology to applications where vacuum performance, pump size and environmental concerns are critical. Its small size, low noise and low power demand allow easy integration into OEM systems. This pump provides affordable oil-free vacuum for a wide variety of applications from analytical instrumentation and high energy physics to semiconductor fabrication and industrial processing.

The IDP-3 employs a hermetic design in which the motor and bearings are outside the vacuum space, allowing full isolation of all pumped gases. The benefits of this design include: lower noise and vibration levels, long-term reliability and simple maintenance requirements. The scroll pump design also minimizes the possibility of catastrophic failures such as seizing or sudden vacuum loss inherent to rotary vane or diaphragm pumps.

The IDP-3 measures 14 x 7 x 6 inches (356 x 178 x 152 mm), yet delivers a robust pumping speed of 60 L/m and a very low base pressure of less than 250 mTorr -- almost four times lower than an equivalently sized membrane/diaphragm pump. In turbo pump applications, lower base pressure reduces power consumption and bearing temperature in the turbo pump, thereby increasing reliability of the vacuum system.

The oil free design not only negates the possibility of oil contamination in the vacuum system, but it reduces the total cost of ownership by completely eliminating the cost of oil and related maintenance costs for its filling, disposal, and cleanup.

"As a compact, high performance source of dry vacuum, the IDP-3 is directly suitable for OEM instrument and vacuum system uses, as well as laboratory applications." said Sergio Piras, Senior Vice President, Vacuum Technologies, Varian, Inc. "This innovative solution expands the number of applications for which dry scroll pumps can meet the requirement for smaller primary pumps."

For more technical information about Varian's vacuum technologies, please visit

Varian, Inc. is a leading worldwide supplier of scientific instruments and vacuum technologies for life science and industrial applications. The company provides complete solutions, including instruments, vacuum components, laboratory consumable supplies, software, training and support through its global distribution and support systems. Varian, Inc. employs approximately 3,800 people and operates manufacturing facilities in 13 locations in North America, Europe and Asia Pacific. Varian, Inc. had fiscal year 2006 sales of $835 million, and its common stock is traded on the NASDAQ Global Select Market under the symbol, "VARI". Further information is available on the company's Web site:

For More Information, Contact:
Public Relations
Varian, Inc.

FCMN Contact:

Source: Varian, Inc.

Web site:

More from Software

All Topics