Scroll Pumps

Scroll Pumps

Scroll Pump is designed for dry vacuum pumping applications.

Model IDP-3 low noise, low power pump is suited for applications such as analytical instrumentation, high energy physics, semiconductor fabrication, and industrial processing. With hermetic design in which motor and bearings are outside vacuum space, it allows full isolation of all pumped gases and minimizes possibility of catastrophic failures. Measuring 14 x 7 x 6 in., pump has pumping speed of...

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Scroll Pumps

Dry Scroll Pump features base pressure of 380 milliTorr.

Single-stage, 4.2 cfm ULVAC Model DISL-100 fills ultimate pressure void left between diaphragm pumps, which are typically rated at 1.5 Torr, and 2-stage scroll pumps down to 7.5 milliTorr. Single-stage scroll design optimizes vapor handling and enables higher continuous inlet pressure performance compared to 2-stage models.

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