Samsung Electronics Places $17M Order for Vacuum Equipment

Vacuum equipment to be installed in world's largest TFT-LCD manufacturing facility in Q1 2007

SEOUL, SOUTH KOREA (13 December 2006)- BOC Edwards, a leading supplier of vacuum, abatement, chemical management equipment and services to the world's semiconductor OEMs and fabs, announced today that it has received a $17M (USD) order from Samsung Electronics Co. Ltd. to supply vacuum equipment for Samsung's Generation 8 TFT-LCD fabrication plant, located in Tangjeong, South Korea.

Investment at Generation 8 (2.2m X 2.5m) is primarily aimed at supplying the large area LCD TV market, which is expected to grow at an annual growth rate of 27 percent and reach a total of $16.9B by 2010.

The order includes diHK pumping systems for harsh duty PECVD processes, diFK pumping systems for load-lock applications, and STP magnetically levitated turbomolecular pumps for plasma etch tools.

"We have been the leading vacuum supplier to Samsung FPD at the Generation 6 and 7 facilities where we have demonstrated a solid record for reliable products and excellent customer support," commented JY Kim, president of Songwon Edwards Limited in Korea. "This most recent success at Generation 8 is evidence of Samsung's continued confidence in BOC Edwards as the vacuum supplier of choice for next-generation FPD manufacturing."

Editor Background

A member of The Linde Group, BOC Edwards employs around 4600 people and is a leading supplier of integrated solutions for the manufacture of microelectronic devices, including semiconductors and flat panel displays. Partnering with fabs, foundries and process tool manufacturers, BOC Edwards provides process-enabling subsystems that are supported by best-in-class operations and maintenance services for its global customer base.

The Linde Group is a world leading industrial gases and engineering company with more than 53,000 employees working in around 70 countries worldwide. Following the acquisition of The BOC Group the company has gases and engineering sales of approximately 12 billion euro. The strategy of The Linde Group is geared towards earnings-based growth and focuses on the expansion of its international business with forward-looking products and services. For more information, please see The Linde Group online at

Specific information on BOC Edwards can be found at E-mail inquiries can be sent to

Company Contact: Andrew Davis +44 (0) 1293 603507
Agency Contact: Sandy Fewkes +1-408-224-4024

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