Rudolph Showcases AXi 935 Advanced Macro Defect Inspection System at SEMICON Taiwan 2007


Taiwan foundry selects Rudolph AXi for Copper CMP

FLANDERS, NJ (September 10, 2007)- Rudolph Technologies, Inc. (NASDAQ: RTEC), the leading provider of process characterization systems for the semiconductor manufacturing industry, will showcase the AXi(TM) 935 Advanced Macro Defect Inspection System during SEMICON® Taiwan, taking place September 12-14, 2007 at the Taipei World Trade Center in Taipei, Taiwan.

"We are seeing demand among our customers in Asia for application-specific inspection capability in the 'sweet spot' of our advanced macro tools," said Scott Balak, the AXi product manager at Rudolph Technologies.

Balak adds, "With sensitivity down to a half micron, we can see defects that are undetectable with traditional macro tools. At the same time, the AXi System is faster and much less expensive than a micro inspection tool. For example, Rudolph recently installed an AXi 935 System for copper CMP inspection at a major Taiwan foundry because it could detect scratches and slurry defects that the customer's existing macro tools were consistently missing."

Announced just one year ago, the AXi 935 Advanced Macro Defect Inspection System provides the base (frontside) platform for Rudolph's all-surface inspection technology, which, when configured with edge and backside inspection modules, can detect and correlate defects on all surfaces of the wafer. Rudolph's automatic defect classification, defect review, and yield management software helps manufacturers use the inspection data to reduce manufacturing costs and accelerate time to market.

Please visit Rudolph Technologies in booth 262 during SEMICON Taiwan to see a live demo of all-surface inspection, and to learn more about Rudolph's metrology, macro defect inspection, and software products.

Rudolph Technologies is a worldwide leader in the design, development, manufacture and support of high-performance process control metrology, defect inspection and data analysis systems used by semiconductor device manufacturers. Rudolph provides a full-fab solution through its families of proprietary products that provide critical yield-enhancing information, enabling microelectronic device manufacturers to drive down costs and time to market. The company has enhanced the competitiveness of its products in the marketplace by anticipating and addressing many emerging trends driving the semiconductor industry's growth. Rudolph's strategy for continued technological and market leadership includes aggressive research and development of complementary metrology and inspection solutions. Headquartered in Flanders, New Jersey, Rudolph supports its customers with a worldwide sales and service organization. Additional information can be found on the company's web site at www.rudolphtech.com.

For more information, please contact:
Rudolph Technologies:
Trade Press:
Virginia Becker
952.259.1647
virginia.becker@rudolphtech.com

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