ReVera Ships a 7th VeraFlex II Production XPS System to Foundries in the Eastern US
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Santa Clara, CA - (PRN): Building on its leading position as plan of record for High K - Metal Gate (HKMG) logic process control, ReVera shipped a 7th VeraFlex II(TM) production XPS system to the Eastern US region. The system is the latest repeat order from one of ReVera's foundry customers and will be used for in-line composition and multi-layer thickness control on production wafers.
"Repeat orders are driven by the rapid expansion of HKMG capacity at 32nm/28nm nodes and demonstrate the unique value of using the VeraFlex II in-line," said Tom Larson, Vice President of Marketing at ReVera. "The need for direct measurement technology is even more critical at the 20nm node since the films are more complex, the tolerances increasingly stringent, and traditional metrology technologies struggle to provide the necessary sensitivity for process control."
VeraFlex II is the only production-capable platform to use X-Ray Photoelectron Spectroscopy (XPS), a materials analysis technology that is proven essential to increase device yield. Since its introduction in 2010, the VeraFlex II has become process of record by all foundry manufacturers at the 3xnm and 2xnm technology nodes for film composition and thickness control on product wafers. The VeraFlex II is also used extensively by advanced node DRAM and Flash manufacturers to control critical tunnel oxides, capacitor films, contact layers, and other complex applications where traditional metrology approaches struggle to deliver viable solutions.
About ReVera
ReVera Incorporated is the leader in composition and film thickness metrology for complex, multi-layer film stacks for advanced node semiconductor manufacturing. Its products are used by device manufacturers worldwide to measure, monitor and control critical device layers in high-volume production and to enable rapid development and control of complex, new processes. ReVera products set the standard for High K - Metal Gate, tunnel oxide and capacitor film metrology. ReVera is backed by a global network of support partners and an experienced staff of engineers, scientists, applications, field service, sales and logistics personnel.
Visit www.ReVera.com for more information.
For more information, contact:
Tom Larson
ReVera Incorporated
Tel: 408-510-7400
Email: tlarson@revera.com
Website: www.ReVera.com
