QNP2 Series XY Piezo Nanopositioning Stages with 50 mm x 50 mm Aperture


Patent-pending design provides unmatched geometric performance



Superior multi-axis accuracy via parallel-kinematic design



Custom materials and vacuum versions



Travels to 120 µm x 120 µm



50 x 50 mm clear square aperture



Aerotech’s QNP2 series XY, parallel-kinematic, piezo positioning stages combine sub-nanometer resolution, high dynamics, and excellent geometric performance in a compact, low-profile package. The QNP2-100-XYA has a 50 mm x 50 mm clear aperture with closed-loop travels up to 100 µm x 100 µm (open-loop travels to 120 µm x 120 µm). The design is ideal for optical microscopy, scanning probe microscopy, x-ray transmission microscopy, and other applications where two-sided part access is required.



Precision Design



QNP2 piezo stages employ a parallel-kinematic flexure and metrology design that ensures the highest level of multi-axis accuracy. FEA-optimized precision flexures ensure high-stiffness and long device life. High stiffness and resonant frequency enable exceptional process throughput and fast closed-loop response. A patent-pending drive design minimizes yaw errors while maintaining an Abbe-compliant metrology system.



All QNP2 piezo stages are available with closed-loop feedback (-C) or open-loop (no feedback). The unique capacitive sensor parallel-metrology design directly measures the output of the positioning carriage enabling 0.15 nm resolution, 0.01% linearity, and 1 nm bidirectional repeatability.



Ultra-Precision Control with Options



Aerotech’s Q-series controllers and drives provide a variety of convenient software options. The Dynamic Controls Toolbox and Motion Designer packages have a host of advanced yet easy-to-use tools such as Learning Control, Harmonic Cancellation, and Command Shaping to improve tracking errors and increase step-and-settle times. Aerotech’s controller architecture easily enables high-speed, tightly-controlled coordinated motion between piezo stages, servos, steppers, and galvos.



An optional mounting plate allows direct mounting to English or metric breadboard optical tables, and a solid tabletop is available. QNP2 piezo stages are also offered in custom materials and vacuum-prepared versions.



For further information, please contact Steve McLane at 412-967-6854 (direct), or via e-mail at smclane@aerotech.com. In addition, more information is at: https://www.aerotech.com/product-catalog/piezo-nanopositioners/qnp2-100-xya.aspx



WORLD HEADQUARTERS

Aerotech, Inc.

101 Zeta Drive

Pittsburgh, PA 15238-2811 U.S.A.

Phone: 412-963-7470

Fax: 412-963-7459

E-mail: sales@aerotech.com

www.aerotech.com

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