Optical Coating suits semiconductor metrology applications.

Press Release Summary:




No. 1900 is a DUV broadband Al+MgF2 optical coating that provides greater than or equal to 88% reflectance at 193 nm. Applied to various glass substrates, coating is suited for applications such as ellipsometery and thin film measurement systems. It can improve throughput of spectrophotometers up to 10% reflectance per surface in DUV wavelengths.



Original Press Release:



Enhanced DUV Broadband Reflective Coating



The Acton Research #1900 coating is a DUV broadband Al+MgF2 optical coating optimized for increased reflectance at 193nm. While delivering superior performance throughout the UV-VIS similar to other Acton Research Al+MgF2 coatings, the #1900 coating provides >/= 88% reflectance at 193nm. The high DUV performance of the #1900 coating provides significant benefit for manufacturers of semiconductor metrology equipment and it is used in applications including ellipsometery and thin film measurement systems. The #1900 is also often selected as a coating to enhance the performance of microscope objectives for the DUV. This high-performance coating can also be employed to improve the throughput of spectrophotometers up to 10% reflectance per surface in DUV wavelengths.

The #1900 coating can be applied to a variety of available glass substrates or on customer supplied material in prototype as well as OEM quantities. For further information please contact the Optics Sales Department at Acton Research at 978.268.0356 or email: chris.penniman@acton-research.com.

Acton Research Corporation manufactures and distributes across a broad spectral, geographic and market range. Acton's optical components and coatings have been used in applications ranging from excimer laser eye correction (LASIK) and DUV lithography to analytical and biomedical instrumentation. Acton instrumentation includes monochromators, spectrographs and complete spectroscopy systems used worldwide for industrial OEM and research applications.

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