New White Light Interferometer for Distance and Thickness Measurement
Press Release Summary:
- interferoMETER IMS5400-DS with measuring rate up to 6 kHz for high speed measurements
- interferoMETER IMS5400-TH for stable measurement from a large distance, even of antireflection-coated targets
- interferoMETER IMS5600-DS with subnanometer precision and < 30 picometers resolution
Original Press Release:
Measurement News From Micro-Epsilon
New: White light interferometer for distance measurement with nanometer accuracy
interferoMETER IMS5400-DS
- Nanometer-precise distance measurements
- Absolute measurement, suitable for step profiles
- Compact and robust sensors with large offset distance
- Measuring rate up to 6 kHz for high speed measurements
New: White light interferometer for thickness measurement with submicron accuracy
interferoMETER IMS5400-T
- Stable thickness measurement with varying measurement distances
- High precision thickness measurements of
- thinnest glass and films
- Stable measurement from a large distance,
- even of antireflection-coated targets
- Industry optimized sensors with robust metal housing & flexible cables
New: White light interferometer for distance measurement with subnanometer accuracy
interferoMETER IMS5600-DS
- Distance measurement with subnanometer precision
- Best-in-Class: Resolution < 30 picometers
- Absolute measurement, suitable for step profiles
- Sensors and cables suitable for vacuum
