New White Light Interferometer for Distance and Thickness Measurement

Press Release Summary:

  • interferoMETER IMS5400-DS with measuring rate up to 6 kHz for high speed measurements
  • interferoMETER IMS5400-TH for stable measurement from a large distance, even of antireflection-coated targets
  • interferoMETER IMS5600-DS with subnanometer precision and < 30 picometers resolution

Original Press Release:

Measurement News From Micro-Epsilon

New: White light interferometer for distance measurement with nanometer accuracy

interferoMETER IMS5400-DS

  • Nanometer-precise distance measurements
  • Absolute measurement, suitable for step profiles
  • Compact and robust sensors with large offset distance
  • Measuring rate up to 6 kHz for high speed measurements

New: White light interferometer for thickness measurement with submicron accuracy

interferoMETER IMS5400-T

  • Stable thickness measurement with varying measurement distances
  • High precision thickness measurements of
  • thinnest glass and films
  • Stable measurement from a large distance,
  • even of antireflection-coated targets
  • Industry optimized sensors with robust metal housing & flexible cables

New: White light interferometer for distance measurement with subnanometer accuracy

interferoMETER IMS5600-DS

  • Distance measurement with subnanometer precision
  • Best-in-Class: Resolution < 30 picometers
  • Absolute measurement, suitable for step profiles
  • Sensors and cables suitable for vacuum

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