Miniature Piezo Motor Positioners use crossed-roller bearings.
Press Release Summary:
Driven by stick-slip-type and piezo-stepping-type linear motors, LPS Series achieves resolutions in low nanometer range and below. Smallest model in series measures 20 x 23 x 10 mm, while largest member features travel ranges of ½ and 1 in. and employs synchronized piezo stepping motor for forces to 10 N. Integrated linear encoder provides 0.5 nm resolution. In addition to single-axis stages, XY combinations and SpaceFAB parallel positioning design with 6° of freedom are also offered.
Original Press Release:
Precision Piezo Motor Positioners
A new series of miniature motorized precision piezo positioners is available from PI miCos.
These compact positioning stages are driven by stick-slip-type and piezo-stepping-type linear motors and achieve resolutions in the low nanometer range and below.
Piezo motor positioners provide long travel ranges like conventional linear positioning stages but allow for a design with a very low profile and extremely compact dimensions without sacrificing precision. PI miCos utilizes crossed-roller bearings for enhanced motion fidelity and integrates linear encoders for closed-loop operation.
The smallest stage of the LPS family currently measures 20x23 mm and is only 10 mm tall. The largest member achieves travel ranges of ½” and 1 inch and employs a synchronized piezo stepping motor for larger forces to 10 N. Its integrated linear encoder provides 0.5 nanometer resolution.
In addition to single-axis stages, XY combinations and the company’s unique SpaceFAB parallel positioning design with 6 degrees of freedom are also offered. Piezo positioners can be designed to be non-magnetic and UHV compatible.  PI miCos provides the precision positioners along with the electronic drivers and closed-loop controllers.
For more information: http://www.micosusa.com/product/subview.cfm_firstlevel=1&sublevel=34.htm