KrF Light Source delivers field-selectable power option.

Press Release Summary:



ELS(TM) 7010x Krypton Fluoride (KrF) light source lets operator adjust power from 30-50 W to accommodate changing wafer design requirements and production needs. In addition to real-time variable power flexibility that enables chipmakers to increase wafer output by up to 25%, system employs Gas Lifetime eXtension (GLX(TM)) technology to reduce system downtime during gas exchanges. Power flexibility and performance stability optimize wafer throughput.



Original Press Release:



Cymer Unveils World's First Field-Selectable 30W - 50W KrF Light Source



SAN DIEGO -- Cymer, Inc. (NASDAQ:CYMI), the market's leading developer of light sources used to pattern advanced semiconductor chips, announced today the introduction of the ELS(TM) 7010x, the world's first field-selectable 30 to 50 watt (W) Krypton Fluoride (KrF) light source. The ELS 7010x allows customers to easily adjust power from 30W to 50W based on changing wafer design requirements and production needs. An extension of Cymer's highly reliable ELS 7000 series product, the ELS 7010x provides significant advancements in power flexibility and performance stability, enabling increased wafer throughput and lower cost of operation.

In addition to real-time variable power flexibility that enables chipmakers to increase wafer output by up to 25 percent, the ELS 7010x provides further value with Cymer's Gas Lifetime eXtension (GLX(TM)) technology. GLX reduces system downtime during gas exchanges by a factor of three, allowing for higher system uptime leading to increased wafer throughput. For existing customers of Cymer's OnPulse(TM) product, the ELS 7010x enhances production capability of current KrF tools. OnPulse guarantees a year-over-year per-pulse cost savings for the life of the light source, along with stable, predictable running costs that scale with wafer production. OnPulse customers can upgrade the current 7000 series light sources to take advantage of the new ELS 7010x capability.

"Cymer is committed to providing market-leading DUV technology with unique capabilities that offer our customers flexibility and production performance, and to offering tools that meet current and future lithography applications," said Ed Brown, president and chief operating officer for Cymer. "With increasing utilization and capacity expansion, the flexible power capability of the ELS 7010x will enable chipmakers to optimize high volume production at lower operating costs."

The Cymer ELS 7010x light source and installed base upgrades for OnPulse customers will be available during the fourth quarter of 2010.

About Cymer

Cymer, Inc. (NASDAQ:CYMI) is the market leader in developing light sources, used by chipmakers worldwide to pattern advanced semiconductor chips. Cymer's light sources have been widely adopted by the world's top chipmakers and the company's installed base comprises approximately 3,300 systems. Continuing its legacy of leadership, Cymer is currently pioneering the industry's transition to EUV lithography, the next viable step on the technology roadmap for the creation of smaller, faster chips. The company is headquartered in San Diego, Calif., and supports its customers from numerous offices around the globe. Cymer maintains a Web site to which it regularly posts press releases, SEC filings, and additional information about Cymer. Interested persons can also subscribe to automated e-mail alerts or RSS feeds. Please visit www.cymer.com.

Cymer, OnPulse, ELS, GLX, and all other Cymer product or service names used herein are either registered trademarks or trademarks of Cymer, Inc. Any other marks mentioned herein are the property of their respective holders.

All Topics