Company News

Cymer Inc.

17075 Thornmint Court, San Diego, CA, 92127, USA

  • 858-385-7300

Latest New Product News from
Cymer Inc.


Data Management Tool monitors light source parameters.

Oct 14, 2011

Available on Argon Fluoride light sources, SmartPulse(TM) provides wafer-level light source parameter monitoring to enable direct correlation to on-wafer performance for optimum process control and yield. Beam metrology module delivers real-time beam performance data from light source, resulting in comprehensive data set. Supporting Fault Detection Classification requirements, SmartPulse(TM)... Read More

Optics & Photonics, Vision Systems

KrF Light Source delivers field-selectable power option.

Jul 22, 2010

ELS(TM) 7010x Krypton Fluoride (KrF) light source lets operator adjust power from 30-50 W to accommodate changing wafer design requirements and production needs. In addition to real-time variable power flexibility that enables chipmakers to increase wafer output by up to 25%, system employs Gas Lifetime eXtension (GLX(TM)) technology to reduce system downtime during gas exchanges. Power... Read More

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Cymer Inc.