Heidelberg Instruments to Support Micro and Nano Research at the Boston University Photonics Center, Boston, USA
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Heidelberg, Germany, September 13, 2006: Heidelberg Instruments announced the sale of an advanced DWL66 fs maskless laser lithography system to the Boston University Photonics Center.
The DWL66 fs maskless lithography system is capable of binary and gray scale exposure, layer to layer alignment, and is able to produce minimum features down to 0.6 microns.
"The Heidelberg direct write laser system provides capabilities within the Photonics Center's Optoelectronic Processing Facility that are not currently available in house and require expensive masks to be fabricated off-site," according to Dr. Helen Fawcett, an engineer at the Boston University Photonics Center.
The addition of grayscale technology, the system will allow the direct write of micro-lenses, lens arrays, MOEMS, and other three-dimensional optical structures directly into photoresist on the final base material (silicon, III-V materials, glasses, etc.). The direct write system will enhance the research capabilities of the Photonics Center faculty members and students in the areas of biophotonics, nano-technology, MEMs, and interactive optical elements (LED's, transmitters, receivers).
"Students and professors will be able to continue their research within a few hours, as opposed to waiting for a week for the delivery of photomasks," says Professor Thomas Bifano, Director of the Photonics Center. "We are very excited to partner with Heidelberg Instruments to enhance the educational experience of our students and increase the efficacy and breadth of our faculty member's research."
"We are very pleased that Boston University Photonics Center have selected our laser lithography system to be installed in their state of the art facility and to be used in pioneering research in light based technologies and development of cutting edge products." states Alexander Forozan, Vice President of Sales and Marketing, Heidelberg Instruments GmbH
About Boston University Photonics Center:
The Boston University Photonics Center is dedicated to academic scholarship, entrepreneurial technology development, and innovative educational enrichment in the field of photonics. The Photonics Center houses shared state-of-the-art facilities, including an optical fiber draw tower, an optical processing facility, a sophisticated optical metrology laboratory, and an integrated optoelectronics packaging laboratory. These assets, combined with leading academic experts and a dedicated staff, make the Photonics Center an extraordinary resource for students, faculty, and affiliated companies. For more information, please visit http://www.bu.edu/photonics
About Heidelberg Instruments, GmbH:
With an installation base of more than 250 systems in over 30 countries, Heidelberg Instruments is a world leader in production of high precision maskless lithography systems. These systems are used for direct writing and photomask production by some of the most prestigious universities and industry leaders in the areas of MEMS, BioMEMS, Nano Technology, ASICS, TFT, Plasma Displays, Micro Optics, and many other related applications.
Heidelberg Instruments, GmbH
Britta Abler
Email: britta.abler@himt.de
Website: www.himt.de
