Gas Process Monitor is suitable for CVD applications.

Press Release Summary:



Compact, corrosion-resistant REPROS monitors and controls etch or deposition processes, measures residual gases, and can be used for leak detection. It monitors reactive gases at pressures up to 9.75 torr. Unit has conductance valve with 3 gas inlet modes, differentially pumped mass filter system, and closed ion source with magnetic field enhancement of ionization chamber. Monitor operates on 24 Vdc and comes with RS-232C and external I/O.



Original Press Release:


ULVAC Technologies, Inc. Introduces REPROS Gas Process Monitor


Methuen, Mass. - ULVAC Technologies, Inc. (www.ulvac.com), a leading supplier of production systems, instrumentation, and vacuum pumps for a variety of industries, offers its REPROS reactive gas process monitor, a compact, corrosion-resistant unit ideal for CVD and etch applications. The REPROS monitors initial reaction processes, reactive gasses at pressures of up to 9.75 torr, and end-point stages for etch and cleaning processes. It also monitors and controls etch or deposition processes, measures residual gasses, and can be used for leak detection.

ULVAC's REPROS features a compact conductance valve with three gas inlet modes and a differentially pumped mass filter system. This system has a closed ion source designed with magnetic field enhancement of the ionization chamber, which improves ionization efficiency by giving the electrons a long and stable emission spiral for high sensitivity, and soft ionization of gasses at 20eV.

Working at low emission current, the REPROS has a long life. It experiences little heating of the ionization chamber, which reduces thermal reactions of gasses measured for long-term accuracy. While the filament and quadrupole rods are kept at low pressure for extended operation, the ionization chamber is at a higher process pressure for increased sensitivity.

The REPROS unit operates on 24 VDC and comes with RS-232C, external I/O, and external interlocks. In addition, the optional RS-485 communication to a PC-based Windows 3.1 or 95 platform allows up to 31 REPROS systems to connect to a single PC. The software features easy operation and data collection of trend or scan data over time. Optional equipment includes a portable stand with adjustable height for easy connection to different vacuum ports, a Faraday cup or a CERATRON EM tube detector for greater sensitivity, and an extended measuring range of M/e = 2 - 300.

About ULVAC Technologies, Inc.
Founded in 1992, ULVAC Technologies, Inc. is a leading supplier of production systems, instrumentation, vacuum pumps and components for the semiconductor, automobile, medical, electrical, gas and petroleum, and refrigeration industries. ULVAC Technologies uses a class-10 process development laboratory and customer demonstration facility to meet the unique needs of their different markets. ULVAC Technologies is a subsidiary of ULVAC Inc., which is comprised of 36 companies engaged in all sectors of the vacuum industry.

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