Ulvac Technologies, Inc.
Methuen, MA 01844
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New Solution Allows MEMS Devices to be Integrated with Semiconductors (CMOS)
PZT piezoelectric thin-film sputtering technology and HVM solution solves technical issues that have hindered the development of MEMS devices. Enables positive outcomes such as miniaturization, reduced production costs, lower power consumption and higher performance. Used to fabricate thin films, which constitute the key technology in sensors and actuators.
Read More »
New Solution Allows MEMS Devices to be Integrated with Semiconductors (CMOS)
PZT piezoelectric thin-film sputtering technology and HVM solution solves technical issues that have hindered the development of MEMS devices. Enables positive outcomes such as miniaturization, reduced production costs, lower power consumption and higher performance. Used to fabricate thin films, which constitute the key technology in sensors and actuators.
Read More »
ULVAC Introduces New LS Series Dry Vacuum Pumps with Built-In Silencer
ULVAC’s LS Series Dry Vacuum Pumps include LS120A, LS300A, LS600A and LS1200A models with pumping speeds ranging from 120 to 1200 m³/h. Units are designed to deliver high pumping speeds at atmosphere pressure and consume power of less than 0.6 W. LS Series pumps are suitable for production industries such as electronic parts and displays. The built-in silencer keeps the noise level to 61 dB.
Read More »
ULVAC Introduces New LS Series Dry Vacuum Pumps with Built-In Silencer
ULVAC’s LS Series Dry Vacuum Pumps include LS120A, LS300A, LS600A and LS1200A models with pumping speeds ranging from 120 to 1200 m³/h. Units are designed to deliver high pumping speeds at atmosphere pressure and consume power of less than 0.6 W. LS Series pumps are suitable for production industries such as electronic parts and displays. The built-in silencer keeps the noise level to 61 dB.
Read More »
ULVAC Receives Order for Resist Strip and Residue Cleaning System from U.S. MEMS Manufacturer
Methuen, Massachusetts - ULVAC Technologies, Inc. has sold a high throughput Enviro-Optima™ Resist Strip and Residue Cleaning System to a U.S. MEMS manufacturer. The system, built in Massachusetts, will be installed this spring at the MEMS manufacturer's facility. The customer evaluated the Enviro-Optima™ system at the ULVAC Applications Lab in Methuen, MA and has successfully converted their...
Read More »
ULVAC Receives Order for Resist Strip and Residue Cleaning System from U.S. MEMS Manufacturer
Methuen, Massachusetts - ULVAC Technologies, Inc. has sold a high throughput Enviro-Optima™ Resist Strip and Residue Cleaning System to a U.S. MEMS manufacturer. The system, built in Massachusetts, will be installed this spring at the MEMS manufacturer's facility. The customer evaluated the Enviro-Optima™ system at the ULVAC Applications Lab in Methuen, MA and has successfully converted their...
Read More »
Helium Leak Detector features tablet-style interface.
Equipped with 7 in. Android touchscreen display/controller, HELIOT 900 features fast pumping speed of 5 L/sec to detect small leaks of helium or hydrogen quickly. Unit has multiple valve design, providing sensitivity of 10–12 Torr-L/s. Internal monitoring of error and alarm conditions detect problems before damage occurs. Offered in 5 different models,- HELIOT 900 is suited for automotive, air...
Read More »
Helium Leak Detector features tablet-style interface.
Equipped with 7 in. Android touchscreen display/controller, HELIOT 900 features fast pumping speed of 5 L/sec to detect small leaks of helium or hydrogen quickly. Unit has multiple valve design, providing sensitivity of 10–12 Torr-L/s. Internal monitoring of error and alarm conditions detect problems before damage occurs. Offered in 5 different models,Ã- HELIOT 900 is suited for automotive,...
Read More »Multi-Ionization Gauge Transducer supports different ranges.
By incorporating signal from Pirani gauge SPU and Atmospheric sensor SAU, G-TRAN Series Multi ionization Gauge SH2 can connect 3 types of vacuum gauges with different measurement ranges. This separation type wide range vacuum gauge, in addition to being able to select gauge head to meet desired vacuum range by end-user, also enables field replacement of only failed gauge heads and measurement of...
Read More »Automatic Spectroscopic Ellipsometer operates at high speeds.
Equipped with automatic R-Theta stage, UNECS-3000A measures thickness and refractive index of transparent or semi-transparent thin film. Automatic mapping function can handle 300 mm dia wafer substrates, and non-contact instrument can measure 106 points on 300 mm dia wafer within 120 sec. Max measurement speed is 20 ms/point, and other features include automatic height adjustment, editable...
Read More »
New Solution Allows MEMS Devices to be Integrated with Semiconductors (CMOS)
PZT piezoelectric thin-film sputtering technology and HVM solution solves technical issues that have hindered the development of MEMS devices. Enables positive outcomes such as miniaturization, reduced production costs, lower power consumption and higher performance. Used to fabricate thin films, which constitute the key technology in sensors and actuators.
Read More »
New Solution Allows MEMS Devices to be Integrated with Semiconductors (CMOS)
PZT piezoelectric thin-film sputtering technology and HVM solution solves technical issues that have hindered the development of MEMS devices. Enables positive outcomes such as miniaturization, reduced production costs, lower power consumption and higher performance. Used to fabricate thin films, which constitute the key technology in sensors and actuators.
Read More »
ULVAC Introduces New LS Series Dry Vacuum Pumps with Built-In Silencer
ULVAC’s LS Series Dry Vacuum Pumps include LS120A, LS300A, LS600A and LS1200A models with pumping speeds ranging from 120 to 1200 m³/h. Units are designed to deliver high pumping speeds at atmosphere pressure and consume power of less than 0.6 W. LS Series pumps are suitable for production industries such as electronic parts and displays. The built-in silencer keeps the noise level to 61 dB.
Read More »
ULVAC Introduces New LS Series Dry Vacuum Pumps with Built-In Silencer
ULVAC’s LS Series Dry Vacuum Pumps include LS120A, LS300A, LS600A and LS1200A models with pumping speeds ranging from 120 to 1200 m³/h. Units are designed to deliver high pumping speeds at atmosphere pressure and consume power of less than 0.6 W. LS Series pumps are suitable for production industries such as electronic parts and displays. The built-in silencer keeps the noise level to 61 dB.
Read More »
ULVAC Receives Order for Resist Strip and Residue Cleaning System from U.S. MEMS Manufacturer
Methuen, Massachusetts - ULVAC Technologies, Inc. has sold a high throughput Enviro-Optima™ Resist Strip and Residue Cleaning System to a U.S. MEMS manufacturer. The system, built in Massachusetts, will be installed this spring at the MEMS manufacturer's facility. The customer evaluated the Enviro-Optima™ system at the ULVAC Applications Lab in Methuen, MA and has successfully converted their...
Read More »
ULVAC Receives Order for Resist Strip and Residue Cleaning System from U.S. MEMS Manufacturer
Methuen, Massachusetts - ULVAC Technologies, Inc. has sold a high throughput Enviro-Optima™ Resist Strip and Residue Cleaning System to a U.S. MEMS manufacturer. The system, built in Massachusetts, will be installed this spring at the MEMS manufacturer's facility. The customer evaluated the Enviro-Optima™ system at the ULVAC Applications Lab in Methuen, MA and has successfully converted their...
Read More »
Helium Leak Detector features tablet-style interface.
Equipped with 7 in. Android touchscreen display/controller, HELIOT 900 features fast pumping speed of 5 L/sec to detect small leaks of helium or hydrogen quickly. Unit has multiple valve design, providing sensitivity of 10–12 Torr-L/s. Internal monitoring of error and alarm conditions detect problems before damage occurs. Offered in 5 different models,- HELIOT 900 is suited for automotive, air...
Read More »
Helium Leak Detector features tablet-style interface.
Equipped with 7 in. Android touchscreen display/controller, HELIOT 900 features fast pumping speed of 5 L/sec to detect small leaks of helium or hydrogen quickly. Unit has multiple valve design, providing sensitivity of 10–12 Torr-L/s. Internal monitoring of error and alarm conditions detect problems before damage occurs. Offered in 5 different models,Ã- HELIOT 900 is suited for automotive,...
Read More »Multi-Ionization Gauge Transducer supports different ranges.
By incorporating signal from Pirani gauge SPU and Atmospheric sensor SAU, G-TRAN Series Multi ionization Gauge SH2 can connect 3 types of vacuum gauges with different measurement ranges. This separation type wide range vacuum gauge, in addition to being able to select gauge head to meet desired vacuum range by end-user, also enables field replacement of only failed gauge heads and measurement of...
Read More »Automatic Spectroscopic Ellipsometer operates at high speeds.
Equipped with automatic R-Theta stage, UNECS-3000A measures thickness and refractive index of transparent or semi-transparent thin film. Automatic mapping function can handle 300 mm dia wafer substrates, and non-contact instrument can measure 106 points on 300 mm dia wafer within 120 sec. Max measurement speed is 20 ms/point, and other features include automatic height adjustment, editable...
Read More »