Ulvac Technologies, Inc.

ULVAC Introduces New LS Series Dry Vacuum Pumps with Built-In Silencer
Fluid & Gas Flow Equipment

ULVAC Introduces New LS Series Dry Vacuum Pumps with Built-In Silencer

ULVAC’s LS Series Dry Vacuum Pumps include LS120A, LS300A, LS600A and LS1200A models with pumping speeds ranging from 120 to 1200 m³/h. Units are designed to deliver high pumping speeds at atmosphere pressure and consume power of less than 0.6 W. LS Series pumps are suitable for production industries such as electronic parts and displays. The built-in silencer keeps the noise level to 61 dB.

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ULVAC Receives Order for Resist Strip and Residue Cleaning System from U.S. MEMS Manufacturer
Cleaning Products & Equipment

ULVAC Receives Order for Resist Strip and Residue Cleaning System from U.S. MEMS Manufacturer

Methuen, Massachusetts - ULVAC Technologies, Inc. has sold a high throughput Enviro-Optima™ Resist Strip and Residue Cleaning System to a U.S. MEMS manufacturer. The system, built in Massachusetts, will be installed this spring at the MEMS manufacturer's facility. The customer evaluated the Enviro-Optima™ system at the ULVAC Applications Lab in Methuen, MA and has successfully converted...

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Sensors, Monitors & Transducers

Multi-Ionization Gauge Transducer supports different ranges.

By incorporating signal from Pirani gauge SPU and Atmospheric sensor SAU, G-TRAN Series Multi ionization Gauge SH2 can connect 3 types of vacuum gauges with different measurement ranges. This separation type wide range vacuum gauge, in addition to being able to select gauge head to meet desired vacuum range by end-user, also enables field replacement of only failed gauge heads and measurement of...

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Test & Measurement

Automatic Spectroscopic Ellipsometer operates at high speeds.

Equipped with automatic R-Theta stage, UNECS-3000A measures thickness and refractive index of transparent or semi-transparent thin film. Automatic mapping function can handle 300 mm dia wafer substrates, and non-contact instrument can measure 106 points on 300 mm dia wafer within 120 sec. Max measurement speed is 20 ms/point, and other features include automatic height adjustment, editable...

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Thermal & Heating Equipment

Annealing System operates without cooling water.

Integrating IR gold image furnace, heating chamber, and temperature controller, MILA-700AR Mini Lamp Annealing System utilizes air cooling system rather than cooling water and accommodates samples up to 20 x 20 x 2.0 mm. Desktop system, measuring 360 x 300, x 310 mm, reaches max temperature of 800°C. Temperature recipe can be input though PC via USB, and temperature data can be displayed on...

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Laboratory and Research Supplies and Equipment

Quadrupole Mass Spectrometer provides residual gas analysis.

Useful for leak detection and system monitoring, Qulee features removable front-end electronics package that permits replacement of quadrupole analyzer. Integrated control display on electronics box eliminates need for PC to operate unit, and provides one-touch partial pressure readout of He, H2O, N2, O2, O2/N2 ratio. Featuring built-in setpoints with serial I/O remote control, unit has max...

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Optics & Photonics

Microscope includes integrated heating system.

Integrating compound microscope with infrared gold image furnace hot stage and video recording and display system, Model MS-E1S enables direct observation of melting and recrystallization behavior of materials. Samples can be maintained in any gas environment and pressure or vacuum level, and can be heated up to 1,000°C in 1 min. Images can be recorded in NTSC video format at 100x, 200x, or...

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Thermal & Heating Equipment

Programmable Furnace heats to 1,200°C in under 24 sec.

Suited for high-temperature materials testing and analysis, tabletop MILA-3000 heats samples using IR gold image furnace with programmable digital temperature controller; clean, atmosphere-controlled, quartz glass vacuum chamber; and gas controller. Mini-Lamp Annealing system can be used for various heating and cooling experiments, with its controlled heating rates of 50°C/sec, temperature...

Read More »
ULVAC Introduces New LS Series Dry Vacuum Pumps with Built-In Silencer
Fluid & Gas Flow Equipment

ULVAC Introduces New LS Series Dry Vacuum Pumps with Built-In Silencer

ULVAC’s LS Series Dry Vacuum Pumps include LS120A, LS300A, LS600A and LS1200A models with pumping speeds ranging from 120 to 1200 m³/h. Units are designed to deliver high pumping speeds at atmosphere pressure and consume power of less than 0.6 W. LS Series pumps are suitable for production industries such as electronic parts and displays. The built-in silencer keeps the noise level to 61 dB.

Read More »
ULVAC Receives Order for Resist Strip and Residue Cleaning System from U.S. MEMS Manufacturer
Cleaning Products & Equipment

ULVAC Receives Order for Resist Strip and Residue Cleaning System from U.S. MEMS Manufacturer

Methuen, Massachusetts - ULVAC Technologies, Inc. has sold a high throughput Enviro-Optima™ Resist Strip and Residue Cleaning System to a U.S. MEMS manufacturer. The system, built in Massachusetts, will be installed this spring at the MEMS manufacturer's facility. The customer evaluated the Enviro-Optima™ system at the ULVAC Applications Lab in Methuen, MA and has successfully converted...

Read More »
Sensors, Monitors & Transducers

Multi-Ionization Gauge Transducer supports different ranges.

By incorporating signal from Pirani gauge SPU and Atmospheric sensor SAU, G-TRAN Series Multi ionization Gauge SH2 can connect 3 types of vacuum gauges with different measurement ranges. This separation type wide range vacuum gauge, in addition to being able to select gauge head to meet desired vacuum range by end-user, also enables field replacement of only failed gauge heads and measurement of...

Read More »
Test & Measurement

Automatic Spectroscopic Ellipsometer operates at high speeds.

Equipped with automatic R-Theta stage, UNECS-3000A measures thickness and refractive index of transparent or semi-transparent thin film. Automatic mapping function can handle 300 mm dia wafer substrates, and non-contact instrument can measure 106 points on 300 mm dia wafer within 120 sec. Max measurement speed is 20 ms/point, and other features include automatic height adjustment, editable...

Read More »
Thermal & Heating Equipment

Annealing System operates without cooling water.

Integrating IR gold image furnace, heating chamber, and temperature controller, MILA-700AR Mini Lamp Annealing System utilizes air cooling system rather than cooling water and accommodates samples up to 20 x 20 x 2.0 mm. Desktop system, measuring 360 x 300, x 310 mm, reaches max temperature of 800°C. Temperature recipe can be input though PC via USB, and temperature data can be displayed on...

Read More »
Laboratory and Research Supplies and Equipment

Quadrupole Mass Spectrometer provides residual gas analysis.

Useful for leak detection and system monitoring, Qulee features removable front-end electronics package that permits replacement of quadrupole analyzer. Integrated control display on electronics box eliminates need for PC to operate unit, and provides one-touch partial pressure readout of He, H2O, N2, O2, O2/N2 ratio. Featuring built-in setpoints with serial I/O remote control, unit has max...

Read More »
Optics & Photonics

Microscope includes integrated heating system.

Integrating compound microscope with infrared gold image furnace hot stage and video recording and display system, Model MS-E1S enables direct observation of melting and recrystallization behavior of materials. Samples can be maintained in any gas environment and pressure or vacuum level, and can be heated up to 1,000°C in 1 min. Images can be recorded in NTSC video format at 100x, 200x, or...

Read More »
Thermal & Heating Equipment

Programmable Furnace heats to 1,200°C in under 24 sec.

Suited for high-temperature materials testing and analysis, tabletop MILA-3000 heats samples using IR gold image furnace with programmable digital temperature controller; clean, atmosphere-controlled, quartz glass vacuum chamber; and gas controller. Mini-Lamp Annealing system can be used for various heating and cooling experiments, with its controlled heating rates of 50°C/sec, temperature...

Read More »

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