Automated Optical Profiler enables non-destructive analysis.

Press Release Summary:



NanoScale(TM) HS200A(TM) acquires images that slice through sample at varying heights, then combines images into 3D model. Advanced confocal microscopy enables it to collect data simultaneously via multiple confocal apertures, accelerating data acquisition process and allowing it to construct and display 3D images in seconds. System is suited for 3D imaging and metrology of rough or sloped surfaces of semiconductor devices, or imaging subsurfaces through transparent materials.



Original Press Release:



Hyphenated Systems Unveils New Automated NanoScale Optical Profiler



Provides the fastest, most repeatable 3D imaging on the widest range of semiconductor structures and materials

Burlingame, CA, November 28, 2006 - Hyphenated Systems, a world-wide provider of hybrid microscopy solutions for three-dimensional imaging and metrology in micro and nanotechnology, announced today the release of its new HS200A NanoScale(TM) Optical Profiler. The HS200A adds extensive automation capability to the Hyphenated Systems workhorse "the HS200OP" for the fastest, most repeatable non-destructive analyses in critical metrology, inspection, failure analysis and quality control applications.
The system incorporates Hyphenated Systems' patented Advanced Confocal Microscopy(TM) (ACM) technology that acquires and displays high-resolution (<50nm) three-dimensional images in seconds. The HS200 systems also provide the user with all the capabilities and flexibility of a fully functional, research-grade binocular optical microscope. The system is ideal for 3D imaging and metrology of rough or sloped surfaces of MEMS and other semiconductor devices, or imaging subsurfaces through transparent materials.

"The HS200 has proven its value as the most flexible microscope platform in a wide range of applications," said Terence Lundy, Hyphenated Systems' vice president and general manager. "Adding automation makes it an even more valuable tool in applications that require a large number of repetitive, routine operations. Unlike other 3D metrology techniques, such as scanned laser confocal or interferometry, the HS200OP series also provides the user with a versatile optical microscope, offering a real, viewable optical image and all of the ancillary imaging and analysis capabilities that optical microscopy can support."

The NanoScale Optical Profiler acquires a series of images that slice through the sample at varying heights, then combines these images into a three-dimensional model of the sample. Its unique ability to collect data simultaneously through multiple confocal apertures greatly accelerates the data acquisition process, allowing it to construct and display 3D images in seconds.

Now the automation capabilities of the HS200A add more speed to routine tasks and improve the repeatability of measurements by removing the variability associated with the operator. The HS200A can move the sample to predefined locations, find features of interest and acquire measurements - all without operator intervention, and without the variability introduced by operator judgment, differences between operators, or operator fatigue.

About Hyphenated Systems
Hyphenated Systems is a world-wide provider of hybrid microscopy solutions for three-dimensional imaging and metrology down to the nanometer level. Based on combinations of optical (conventional and advanced confocal) and atomic force, spectroscopy, or interferometry, Hyphenated Systems provides its customers with the advanced hybrid tools they need to drive innovation in macro, micro and nanotechnology. Key markets include microfluidics, MEMS and semiconductors. The company's solutions leverage over 50 years of experience from its parent company, Technical Instrument. Hyphenated Systems is headquartered in Burlingame, CA. For more information, please visit www.hyphenated-systems.com.

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