Oxford Instruments Asylum Research Releases New Application Note: “Characterizing Ferroelectric Response in Silicon-Doped Hafnium Oxide Thin Films”

April 22, 2020 (Santa Barbara, CA). Material science innovations are critical to the semiconductor industry’s efforts to make more powerful and more energy efficient processors and data storage devices. Hafnium oxide is one such material that has already been adopted in some new devices. It is one of the few binary oxides that are thermodynamically stable with silicon and can be used as a high-k dielectric material. More recently, it was discovered that hafnium oxide could be deposited as a ferroelectric thin film by doping it with silicon and mechanically “capping” the film. This is a promising material for next-generation devices that take advantage of silicon/ferroelectric junctions such as ultra-fast, low-power ferroelectric transistors (FeFETS).

The new application note demonstrates how Asylum Research atomic force microscopes (AFMs) can be used to characterize ferroelectric hafnium oxide thin films using piezoelectric response force microscopy (PFM). Ferroelectric materials typically exhibit an extremely small piezoelectric response that can be difficult to measure with conventional PFM. However, Asylum Research’s exclusive Dual Amplitude Resonance Tracking (DART) technology greatly increases the sensitivity of PFM measurements while avoiding measurement artifacts that are common in conventional PFM. This capability is unique to Asylum Research and available on all MFP-3D, Cypher, and Jupiter AFM models.

For more information see https://afm.oxinst.com/Hf-oxide

For further information please contact: Ben Ohler, Director of Marketing, 805-696-6466

About Oxford Instruments Asylum Research
Oxford Instruments Asylum Research is the technology leader in atomic force microscopy for both materials and bioscience research. Asylum Research AFMs are widely used by both academic and industrial researchers for characterizing samples from diverse fields spanning material science, polymers, thin films, energy research, and biophysics. In addition to routine imaging of sample topography and roughness, Asylum Research AFMs also offer unmatched resolution and quantitative measurement capability for nanoelectrical, nanomechanical and electromechanical characterization. Recent advances have made these measurements far simpler and more automated for increased consistency and productivity. Its Cypher™, MFP-3D™, and Jupiter™ AFM product lines span a wide range of performance and budgets. Asylum Research also offers a comprehensive selection of AFM probes, accessories, and consumables. Sales, applications and service offices are located in the United States, Germany, United Kingdom, Japan, France, India, China and Taiwan, with distributor offices in other global regions.

About Oxford Instruments plc
Oxford Instruments designs, supplies and supports high-technology tools and systems with a focus on research and industrial applications. Innovation has been the driving force behind Oxford Instruments' growth and success for 60 years, supporting its core purpose to address some of the world’s most pressing challenges.

The first technology business to be spun out from Oxford University, Oxford Instruments is now a global company and is listed on the FTSE250 index of the London Stock Exchange (OXIG). Its strategy focuses on being a customer-centric, market-focused Group, understanding the technical and commercial challenges faced by its customers. Key market segments include Semiconductor & Communications, Advanced Materials, Healthcare & Life Science, and Quantum Technology.

Their portfolio includes a range of core technologies in areas such as low temperature and high magnetic field environments; Nuclear Magnetic Resonance; X-ray, electron, laser and optical based metrology; atomic force microscopy; optical imaging; and advanced growth, deposition and etching.

Oxford Instruments is helping enable a greener economy, increased connectivity, improved health and leaps in scientific understanding. Their advanced products and services allow the world’s leading industrial companies and scientific research communities to image, analyse and manipulate materials down to the atomic and molecular level, helping to accelerate R&D, increase manufacturing productivity and make ground-breaking discoveries.