VAT, Inc.

Fluid & Gas Flow Equipment

VAT Edge Welded Bellows

VAT - Woburn, USA – VAT custom engineered edge welded bellows are designed and manufactured to the most advanced specifications on the market. When it comes to high purity bellows that are particleand surface contaminant free, VAT is the undisputed leader. VAT's production of welded bellows is world class especially in process automation. VAT welded bellows production systems are located in a...

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Corrosion-Resistant Transfer Valves suit SEMI applications.
Fluid & Gas Flow Equipment

Corrosion-Resistant Transfer Valves suit SEMI applications.

Pneumatically operated and locked in closed and open position, VAT S043/S053 REAL L-MOTION Valve- serves SEMI applications handling 200, 300, and 450 mm wafers as well as brightness bridge LED (HB-LED) applications. Products handle such corrosive process environments as Etch and CVD, offering extended service intervals. Actuator has integrated, mechanically triggered sequence control, ensuring...

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Fluid & Gas Flow Equipment

Transfer Valve promotes flexibility in equipment design.

Designed for vacuum production tools with slit heights smaller than 80 mm, FlapVAT is available with stainless steel or aluminum body and gate as well as in horizontal or vertical orientation. Valve technology is based on common flapper valve that enables swift exchange of gate o-ring, and integrated actuator allows for differential pressure opening wherever this is required. Valve is available...

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High Vacuum Gate Valves feature rugged stainless steel body.
Fluid & Gas Flow Equipment

High Vacuum Gate Valves feature rugged stainless steel body.

Designed for high vacuum pump isolation and substrate transfer applications, Series 11.0 HV gate valves are offered with manual or pneumatic actuation, and come standard with position indicator. They provide 200,000 cycles before first service, and incorporate VATLOCK gate mechanism that minimizes operating shock and is mechanically locked in closed position. HV Valves are available in 2.5-12 in....

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Transfer Valve suits flat panel display production systems.
Fluid & Gas Flow Equipment

Transfer Valve suits flat panel display production systems.

Available in aluminum and sizes from 4 x 54 in. to 12 x 100 in., Series 06 XL-VAT Transfer Valve is designed for large substrate production systems for flat panel display, solar, glass coating, and other applications. Modular design facilitates maintenance, and o-ring sealed gate can be accessed for service via removable top cover in body. Along with adjustable gate sealing force, series features...

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Gate Valve is designed for harsh process environments.

Series 09.1 Stainless Steel High Vacuum Gate Valve is bellows sealed, features grease-free vacuum area that has no moving parts, and does not require re-lubrication or readjustment after cleaning. With full differential pressure of 1 bar, valve is available in DN 63-160 mm sizes and offers options such as heating jacket, ports on body, as well as JIS, ASA-LP, CF, and custom flanges.

Read More »
Fluid & Gas Flow Equipment

VAT Edge Welded Bellows

VAT - Woburn, USA – VAT custom engineered edge welded bellows are designed and manufactured to the most advanced specifications on the market. When it comes to high purity bellows that are particleand surface contaminant free, VAT is the undisputed leader. VAT's production of welded bellows is world class especially in process automation. VAT welded bellows production systems are located in a...

Read More »
Corrosion-Resistant Transfer Valves suit SEMI applications.
Fluid & Gas Flow Equipment

Corrosion-Resistant Transfer Valves suit SEMI applications.

Pneumatically operated and locked in closed and open position, VAT S043/S053 REAL L-MOTION Valve- serves SEMI applications handling 200, 300, and 450 mm wafers as well as brightness bridge LED (HB-LED) applications. Products handle such corrosive process environments as Etch and CVD, offering extended service intervals. Actuator has integrated, mechanically triggered sequence control, ensuring...

Read More »
Fluid & Gas Flow Equipment

Transfer Valve promotes flexibility in equipment design.

Designed for vacuum production tools with slit heights smaller than 80 mm, FlapVAT is available with stainless steel or aluminum body and gate as well as in horizontal or vertical orientation. Valve technology is based on common flapper valve that enables swift exchange of gate o-ring, and integrated actuator allows for differential pressure opening wherever this is required. Valve is available...

Read More »
High Vacuum Gate Valves feature rugged stainless steel body.
Fluid & Gas Flow Equipment

High Vacuum Gate Valves feature rugged stainless steel body.

Designed for high vacuum pump isolation and substrate transfer applications, Series 11.0 HV gate valves are offered with manual or pneumatic actuation, and come standard with position indicator. They provide 200,000 cycles before first service, and incorporate VATLOCK gate mechanism that minimizes operating shock and is mechanically locked in closed position. HV Valves are available in 2.5-12 in....

Read More »
Transfer Valve suits flat panel display production systems.
Fluid & Gas Flow Equipment

Transfer Valve suits flat panel display production systems.

Available in aluminum and sizes from 4 x 54 in. to 12 x 100 in., Series 06 XL-VAT Transfer Valve is designed for large substrate production systems for flat panel display, solar, glass coating, and other applications. Modular design facilitates maintenance, and o-ring sealed gate can be accessed for service via removable top cover in body. Along with adjustable gate sealing force, series features...

Read More »

Gate Valve is designed for harsh process environments.

Series 09.1 Stainless Steel High Vacuum Gate Valve is bellows sealed, features grease-free vacuum area that has no moving parts, and does not require re-lubrication or readjustment after cleaning. With full differential pressure of 1 bar, valve is available in DN 63-160 mm sizes and offers options such as heating jacket, ports on body, as well as JIS, ASA-LP, CF, and custom flanges.

Read More »

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