Motorized Rotary Stage suits wafer processing.
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Press Release Summary:
Providing non-contact operation, Z-theta Stage is not affected by torque variations because there is no gear interface. Unit provides 360° of rotational capability and accommodates wafers of varying thicknesses and diameters. It features 0.25 µm resolution in Z axis and 0.72 arc-sec in Theta axis with repeatability of ±2 µm in Z axis and ±1 arc-sec for Theta. Stage offers continuous or limited travel, cog-free motor for smooth motion, and zero gear backlash.
Original Press Release:
JPSA Introduces High-Precision Z-theta Motorized Rotary Stage
Hollis, New Hampshire, USA, december 2, 2006 - A new integrated Z-theta motorized stage from J. P. Sercel Associates (JPSA) offers high precision operation for wafer processing and positioning. Its non-contact operation - as opposed to typical worm and wheel rotary designs - reduces maintenance requirements, is less susceptible to wear, and is not affected by torque variations because there's no gear interface. The new Z-theta stage provides 360 degrees of rotational capability, and its Z-axis capability makes it applicable to a wide range of applications, with the ability to accommodate wafers of varying thicknesses and diameters.
Advantages of the new rotary stage include continuous or limited travel, excellent accuracy and repeatability, a cog-free motor for smooth motion; zero gear backlash; low wobble and bearing run-out; and no accuracy changes over time due to gear wear.
The stage is ideal for laser micromachining applications and wafer processing, among others. Resolution (microns/arc seconds) is 0.25µm in the Z axis, and 0.72 arc seconds in the Theta axis; Repeatability of ±2 µm in the Z axis, and ±1 arc second for Theta.
JPSA products and services include UV excimer, DPSS and ultra-fast laser micromachining systems, UV and VUV laser beam delivery systems, UV laser materials processing development, optical damage testing, and excimer laser refurbishment services. JPSA operates a high-performance UV laser job shop as well as a systems engineering and manufacturing business. For more information, visit www.jpsalaser.com, or contact the company at 17D Clinton Drive, Hollis, NH 03049 USA, Tel. 603.595.7048, fax 603.598.3835.
