BOC Edwards Marks 2000th IGX Dry Pump Milestone Sale


WILMINGTON, MASS (16 October 2006)- BOC Edwards, a leading supplier of vacuum, abatement, chemical management equipment and services to the world's semiconductor OEMs and fabs, announced today that it has sold its 2000th iGX pump. This is a major milestone for the product line; it confirms the product's position as the de facto dry pump standard within the semiconductor industry for clean to medium-duty applications, including: load lock, transfer, metrology, lithography, PVD process and pre-clean, RTA, strip/ash, oxide, silicon and metal etch, and implant sources.

"We are very proud to have achieved this goal," said Chris Shaw, global product manager, semiconductor dry pumps, BOC Edwards. "The iGX has rapidly become a mainstay in our product line and we expect it to continue in that role. It is particularly gratifying to realize the level of customer confidence and satisfaction that these sales denote. In addition to a feature set that seems to be a near perfect fit with our customers' requirements, the iGX has established an excellent reputation for reliability."

The iGX Series sets the standard for zero maintenance between major overhauls. Its high efficiency design provides continuous pumping throughout the pressure range and reduces utility costs, lowering the cost of ownership. Ethernet connectivity permits key data to be viewed via web pages, and the iGX modular design allows users to tailor each pump to suit individual fab requirements.

Editor Background
A member of The Linde Group, BOC Edwards employs around 4600 people and is a leading supplier of integrated solutions for the manufacture of microelectronic devices, including semiconductors and flat panel displays. Partnering with fabs, foundries and process tool manufacturers, BOC Edwards provides process-enabling subsystems that are supported by best-in-class operations and maintenance services for its global customer base.

The Linde Group is a world leading industrial gases and engineering company with more than 53,000 employees working in around 70 countries worldwide. Following the acquisition of The BOC Group the company has gases and engineering sales of approximately 12 billion. The strategy of The Linde Group is geared towards earnings-based growth and focuses on the expansion of its international business with forward-looking products and services.

For more information, please see The Linde Group online at www.linde.com

Specific information on BOC Edwards can be found at www.bocedwards.com.
E-mail inquiries can be sent to info@bocedwards.com.

Company Contact:
Andrew Davis
+44 (0) 1293 603507
e-mail:pressandmedia@bocedwards.com
Agency Contact: Sandy Fewkes +1-408-224-4024
e-mail: sandy@mind-write.com

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