RLR Advanced Automation Systems, Inc.
2602 Challenger Tech Ct., Suite 130
Oviedo, FL 32765
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Deposition Tool suits low-defect thin film markets.
Flexible dual-ion beam reactive-sputtering tool provides platform for multi-layer film development as well as tightly controlled production deposition. Low-defect, high-uniformity tool incorporates multi-axis substrate/sputter target relative positioning control, 4-material target tooling, substrate rotation speed control, and high order polynomial process variable control. It is suited for...
Read More »Deposition Tool suits low-defect thin film markets.
Flexible dual-ion beam reactive-sputtering tool provides platform for multi-layer film development as well as tightly controlled production deposition. Low-defect, high-uniformity tool incorporates multi-axis substrate/sputter target relative positioning control, 4-material target tooling, substrate rotation speed control, and high order polynomial process variable control. It is suited for...
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