XYZ-Piezo-Scanner provides 25 picometer resolution.

Press Release Summary:

Equipped with ultra low noise E-536 driver/controller, P-363 PicoCube® employs non-contact, direct-measuring, parallel-metrology capacitive sensors for position feedback. Piezeo drives allow for resonant frequency of 10 kHz, important for high-speed scanning applications. Housed in titanium case, scanner is vacuum compatible and suitable for AFM, SPM, nanomanipulation, bio-technology, nanotechnology, nano-imprint, semiconductor, and data storage test equipment.

Original Press Release:

XYZ-Piezo-Scanner for AFM Provides 25 Picometers Resolution

March 2007 - PI (Physik Instrumente) L.P., a leading manufacturer of nanopositioning and piezo-based precision motion-control equipment for bio-nanotechnology, photonics and semiconductor applications offers a new ultra-high-resolution positioning & scanning system.

The minute P-363 PicoCube®, together with its ultra-low noise E-536 driver / controller, provide significantly higher resolution and positional stability than previous multi-axis scanning stages.

Features & Advantages:
o High-Speed XYZ Scanner for AFM / SPM & Manipulation Tool for Nanotechnology
o Custom, High-Stiffness Shear Piezo Drives Provide up to 10 kHz Resonant Frequency for Faster Response and Higher Scanning Performance
o Ultra-Low-Noise Controller Enables 25 Picometers (0.025 nm) Resolution
o Capacitive Feedback for Exceptional Precision and Linearity
o Parallel Metrology for Better Multi-Axis Accuracy
o Small & Rugged Design with Titanium Case
o Vacuum Compatible

Typical Applications: AFM (Atomic Force Microscopy), SPM (Scanning Probe Microscopy) and Nanomanipulation, Bio-Technology, Nanotechnology, Nano-Imprint, Semiconductor & Data-Storage Test Equipment.

Why are PicoCube® Systems Superior?
PicoCube® systems were designed to overcome the limitations of open-loop piezo-tube based scanners which provide high resolution motion but poor linearity and trajectory guidance.

The compact PicoCube® is based on exceptionally robust, high-stiffness piezo drives rather than tubes and employs non-contact, direct-measuring, parallel-metrology capacitive sensors for position feedback. The low-inertia drives allow for a resonant frequency of 10 kHz, important for high speed scanning applications.

Why Parallel Metrology?
Parallel metrology can "see" all controlled degrees of freedom simultaneously and compensate for off-axis motion in real time. The benefits are a reduction of runout and off-axis errors, straighter multi-axis motion and improved repeatability.

The new ultra-low-noise E-536 closed-loop controller provides unprecedented positional stability and can be controlled with analog or digital signals. Extensive software support including LabView(TM) drivers is provided.

About PI
PI is a leading manufacturer of nanopositioning and precision motion-control equipment for photonics, nanotechnology, semiconductor and life science applications. PI has been developing and manufacturing standard & custom precision products with piezoelectric and electromagnetic drives for 35+ years. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. PI is present worldwide with eight subsidiaries and total staff of 400+.

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