XY Piezoelectric Stages feature 1,000 µm travel range.

Press Release Summary:

Closed-loop P-628.2CD incorporates 32-bit digital controller; friction-free, stiff flexure system; and multilayer piezo stack actuators. Also offered in single-axis version, vacuum-compatible product is equipped with non-contact capacitive-sensors and provides motion linearity to 0.02% with under 1 nm resolution. Precision flexure-guided scanning stages, suited for nanometrology/precision microscopy instrument designers, offers up to 99.98% position accuracy.

Original Press Release:

XY Piezoelectric Nanometrology Stages Feature Record Travel Range

Auburn, MA, - June 2006 - PI (Physik Instrumente) L.P., a leading manufacturer of nanopositioning and precision motion-control equipment for bio / nanotechnology, photonics, semiconductor and life science applications, offers the new closed-loop P-628.2CD XY piezoelectric stages.

These precision flexure-guided scanning stages provide a record travel range of 1000 µm and allow nanometrology / precision microscopy instrument designers to probe much larger areas than before. A lower cost, single axis version is also offered.

Typical Applications
Scanning Probe Microscopy, Nanometrology, Biotechnology, Interferometry, , Nanopositioning, Quality Assurance, Semiconductor Technology

Controllers: High Speed, Digital Control
A variety of ultra-low-noise 32-bit digital controllers provide fast communications and come with a wide selection of software tools.

Record Travel Range of 1000 µm, Yet Very Stiff and Precise
The long travel range is achieved with a newly designed, friction-free and extremely stiff flexure system, which also offers rapid response and excellent guiding accuracy with trajectory precision in the low-nanometer range. High acceleration forces are provided by multiple, newly-developed high-force multilayer piezo stack actuators.

Features & Advantages
o 1000 µm XY-Travel Allows Probing Larger Areas
o Closed-Loop Digital Control for Up to 99.98 % Position Accuracy
o Vacuum-Compatible
o Stiff and Compact Design for High Resonant Frequencies and Easy Integration
o Resolution <1 nm
o Frictionless, Maintenance-Free Precision Flexure Guiding System
o Ceramic-Encapsulated Piezo Drives for Humidity Protection
o Capacitive Direct-Metrology Sensors for Faster Servo Response

Maintenance-Free, No Wear & Tear
Because flexure-guides, actuators and sensors are all frictionless and maintenance-free, these nanopositioning systems achieve outstanding levels of reliability. The integrated multilayer piezo drives are protected against humidity by a patented ceramic-encapsulation.

Higher Linearity Through Direct-Motion Metrology with Capacitive Sensors
The stages are equipped with non-contact capacitive-sensors and provide motion linearity to 0.02% with effective resolution in the sub-nanometer range. PI capacitive sensors are absolute-measuring, direct-metrology devices that boast very high bandwidth and exhibit no periodic errors.

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