Press Release Summary:
Designed to generate high-purity vapor from liquid precursors required for thin film deposition, Turbo-Vaporizer(TM) Model 2820 features precision liquid and gas mass flow control and low temperature vaporization. Multi-stage turbo-vaporizer with integral hot gas filtration generates vapor for delivery to process while maintaining integrity of liquid molecule. Applications include semiconductor films, chemical research, catalyst production, optical coatings, and fuel cells.
Original Press Release:
Applications Include Precision Film Coatings for Demiconductors and Chemical Research.
Hatfield, Pennsylvania (December 15, 2006) - Emerson Process Management has introduced the Brooks® / MSP Model 2820 Turbo-Vaporizer(TM) System for fine droplet, Direct Liquid Injection (DLI) vaporization. This new model is designed to generate high purity vapor from liquid precursors required for thin film deposition, in applications including semiconductor films, chemical research, catalyst production, fiber optics, optical coatings, industrial coatings and fuel cells.
The new Brooks Model 2820 features fine droplet atomization, precision liquid and gas mass flow control and low temperature vaporization. An efficient multi-stage turbo-vaporizer with integral hot gas filtration generates vapor for delivery to the process while maintaining the integrity of the liquid molecule.
Stable and repeatable liquid flow measurement and control are key to consistent film formation. Precursor chemicals used for thin film deposition have thermodynamic properties that are usually not very well determined. To compensate for this, the Model 2820 uses a Brooks QUANTIM® mass flow controller for liquid precursor flow control. A Coriolis sensor at the heart of the device measures liquid mass flow directly with an accuracy that is independent of fluid properties. This is in contrast to other liquid flow sensor technologies which do not measure mass directly, but infer mass flow based on the measurement of another related fluid property. Errors in flow control can lead to measurable variations in film deposition rate and quality.
In addition to QUANTIM, a Brooks thermal gas mass flow controller is used to control the flow of carrier gas to the atomizer. The vaporizer works with a wide variety of carrier gases, including hydrogen, nitrogen, helium and argon.
The Model 2820 Turbo-Vaporizer is capable of multi-stream vaporization for applications requiring multi-component film deposition. An optional vaporizer control module is also available for stand-alone operation of the vaporizer in a research environment or where the vaporizer will be replacing a bubbler and the process controller is not set up for direct liquid injection.
About Emerson Process Management
Emerson Process Management (www.emersonprocess.com), an Emerson business, is a leader in helping businesses automate their production, processing and distribution in the chemical, oil and gas, refining, pulp and paper, power, food and beverage, pharmaceutical and other industries. Brooks Instrument (brooksinstrument.com) has supplied liquid and gas process control solutions to industries throughout the world. Brooks manufactures a complete line of flow measurement and control instrumentation including thermal mass, variable area, Coriolis, and positive displacement flowmeters, as well as a full line of supporting accessories. Brooks' technology and expertise play a key role in Emerson's combining of superior products and technology with industry-specific engineering, consulting, project management and maintenance services. Emerson's brands include: PlantWeb®; Brooks®; Fisher®; Micro Motion®; Rosemount®; DeltaV(TM) Ovation®; and AMS(TM) Suite.
St. Louis-based Emerson (www.gotoemerson.com) is a global leader in bringing technology and engineering together to provide innovative solutions to customers in electronics and telecommunications; process control; semiconductor processing; industrial automation; heating, ventilating and air conditioning; and appliance and tools. Sales in fiscal 2003 were $14 billion.
PlantWeb; Brooks; Fisher; Micro Motion; Rosemount; DeltaV; and Ovation are marks of Emerson Process Management. All other marks are the property of their respective holders.
Scott Amsbaugh, Brooks Instrument
Peter Dossing, Emerson Process Management