Transducers measure pressures from atmospheric to 10-8 Torr.

Press Release Summary:



Able to be mounted in any orientation, Series 970 Cold Cathode Transducers use up to 4 sensors, including cold cathode, MicroPirani(TM), and Piezo technologies. Providing functionality over wide measurement range, it eliminates need for multiple gauges. They include both analog and digital communication and can be used with PDR900 controller. Three independent relay set points provide process control and set point values, hysteresis, and direction are user-configurable.



Original Press Release:



MKS Introduces Series 970 Cold Cathode Transducers



A low-cost, compact measurement solution

Andover, MA, May 5, 2009 - MKS Instruments, Inc. (NASDAQ: MKSI), a global provider of technologies that enable advanced processes and improve productivity, has introduced the Series 970 Cold Cathode Transducers, a compact and reliable measurement solution for pressures ranging from atmospheric to 10-8 Torr. The low-cost Series 970 transducers may be mounted in any orientation, and include both analog and digital communication for ease of operation.

The 970 Series transducers use up to four sensors, including cold cathode, MicroPirani(TM) and Piezo technologies. This provides for superior functionality over a wide measurement range, and eliminates the need for multiple gauges. The cold cathode design is user serviceable, decreasing downtime and outside costs. The MEMS-based Micro Pirani sensor allows low turn-on pressure for enhanced reliability. It is automatically zeroed during the pump down cycle for improved accuracy.
The transducers can be used with the PDR900 controller for easy set up and use. Three independent relay set points provide process control; users can configure set point values, hysteresis and direction via digital communication. All adjustments and monitoring are delivered in real-time via a host computer.

About MKS:

MKS Instruments, Inc. is a global provider of instruments, subsystems and process control solutions that measure, control, power, monitor and analyze critical parameters of advanced manufacturing processes to improve process performance and productivity. Our products are derived from our core competencies in pressure measurement and control, materials delivery, gas composition analysis, electrostatic charge management, control and information technology, power and reactive gas generation, and vacuum technology. Our primary served markets are manufacturers of capital equipment for semiconductor devices, and for other thin film applications including flat panel displays, solar cells, data storage media, and other advanced coatings. We also leverage our technology in other markets with advanced manufacturing applications including medical equipment, pharmaceutical manufacturing, and energy generation and environmental monitoring.

Corporate contact:

MaryAnn Naddy

Phone: 978-645-5538

Fax: 978-557-5100

MaryAnn_Naddy@mksinst.com

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