Software targets semiconductor production environments.
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Press Release Summary:
Run-to-Run plug-in for Advanced Process Control platform provides development environment that minimizes model management activities through unified modeling structure. It enables process engineers to develop process controls without complex software code. Users can deploy pre-configured controllers for process areas such as lithography, etch, CMP, and diffusion. Software also offers interoperable run-to-run control, fault detection, and yield management.
Original Press Release:
Brooks Software Introduces Run-to-Run Application for Brooks APC Platform
Patented Technology Supports High Product Mix Semiconductor Production Environments to Lower Cost of Ownership
CHELMSFORD, Mass. - April 5, 2005 - Brooks Software, a division of Brooks Automation, Inc., and a leading provider of real-time enterprise applications for collaborative, complex manufacturing environments, today announced the availability of a Run-to-Run (R2R) plug-in application for the Brooks Advanced Process Control (APC) Platform.
The new R2R application module provides a development environment that lowers the cost of ownership by reducing model management activities through a unified modeling structure and advanced technology particularly suited for high mix product environments. The R2R module includes a graphical development environment enabling process engineers to quickly develop their own process controls without complex software code. Furthermore, users can deploy pre-configured controllers for common process areas such as lithography, etch, CMP, and diffusion.
"The R2R application module extends the power of the Brooks APC Platform by putting advanced, graphically-oriented control algorithms directly in the hands of fab process and control engineers," said John Scoville, director of APC products for Brooks Software. "The R2R module is particularly well suited for high mix production environments allowing process engineers to quickly respond to changing product mix. The pre-configured process application templates get users up and running quickly helping to lower the overall cost of ownership."
The Brooks R2R module is built on the Brooks APC Platform, the first commercially available framework to comply with the new SEMI E133 process control system (PCS) standard. It provides a high level of interoperability to ensure that manufacturers can deploy Brooks' best-of-breed application modules, as well as third-party control applications, or customer developed proprietary applications. The APC Platform provides a user interface and execution engine that allows users to configure APC strategies graphically without relying on costly software code or scripts.
Brooks APC Platform allows semiconductor manufacturers to leverage real-time applications that sense changes and immediately respond in the appropriate manner, which increases the efficiency and productivity of manufacturing operations. The APC Platform gives users greater control over changes in product specifications, equipment configuration and process technologies, as well as fluctuations in demand.
Currently, most equipment engineering applications are essentially islands of automation. With the Brooks APC Platform, users can take advantage of a universal integration approach, allowing faster deployment and the added value of interoperable run-to-run control, fault detection, yield management, and dispatching systems. These capabilities are outlined as key enablers for semiconductor manufacturers to meet the International Technology Roadmap for Semiconductors.
Brooks Software Presenting at AEC/APC Conference
Brooks Software will be demonstrating its APC solutions and presenting a tutorial at the 6th European Advanced Equipment Control/Advanced Process Control (AEC/APC) Conference in Dublin, Ireland, April 6-8, 2005.
About Brooks Software
Brooks Software, a division of Brooks Automation, provides real-time applications that support enterprise-wide initiatives for greater efficiency and productivity in collaborative, complex manufacturing. Brooks' Sense Decide Respond(tm) manufacturing software solutions are the foundation for enterprise initiatives in supply chain execution, closed loop automation, lean manufacturing and enterprise performance management. Installed in the majority of Fortune 500 manufacturers, Brooks Software delivers competitive advantage to aerospace & defense, automotive, high tech, life sciences and semiconductor manufacturers worldwide. For more information, visit www.brookssoftware.com.
About Brooks Automation, Inc.
Brooks Automation delivers automation solutions to the global semiconductor and related industries. The company provides hardware, software, and professional services to help manage every wafer, reticle, and data movement in the fab, improving throughput and yield while reducing cost and time to market. Brooks' products and capabilities are used in virtually every semiconductor fab in the world. For information, visit the company's web site at www.brooks.com.
