Press Release Summary:
S-335 Piezo Steering Mirrors come with integrated motion amplifier, which provides tip/tilt angle up to 35mrad. Units offer tip/tilt motion of top platform around two orthogonal axes and are flexure-guided. Products are suitable for image stabilization, laser beam steering, materials processing, and lithography applications. S-335 is based on a parallel-kinematics design with coplanar rotational axes.
Original Press Release:
Miniaturized Fast Steering Mirror Platforms (FSM) for Laser Beam Control are Piezo-Based
PI’s new small steering stages find use in microscopy, semiconductor manufacture, optics, and photonics.
PI (Physik Instrumente), leader in the field of piezo technology and precision motion systems and solutions, broadens its portfolio of piezo steering mirrors. With milli-second response and settling time and high dynamic linearity, the new S-335 fast steering mirror (FSM) platforms are ideal for precision image processing and image stabilization, laser beam steering, materials processing, and lithography.
2-Axis, Frictionless Guiding, No Polarization Rotation
S-335 steering mirror platforms provide precise angular tip/tilt motion of the top platform around two orthogonal axes. These flexure-guided, electro-ceramic driven systems can provide higher accelerations than other actuators, enabling step response times in the sub-millisecond range, with frictionless backlash-free motion. The single pivot-point design also prevents the drawback of polarization rotation, which is common with conventional 2-axis stacked systems, e.g. galvo scanners.
Long Ranges with Integrated Motion Amplifier
Integrated EDM flexure based motion amplifiers provide an industry-leading tip/tilt angle up to 35mrad, equal to an optical deflection angle of 70mrad (4°). ID chip support allows for fast start-up and a simple data exchange between tip/tilt platforms and controllers.
Parallel-Kinematics: Smaller with Improved Stability, Linearity & Dynamics
PI piezo steering mirrors are based on a parallel-kinematics design with coplanar rotational axes and a single moving platform driven by two pairs of differential actuators. The advantage is jitter-free, multi-axis motion with excellent temperature stability. Compared to stacked (two-stage) mirror scanners, the parallel-kinematics design provides symmetrical dynamic performance in both axes with faster response and better linearity in a smaller package.
Read Tech Article, Advances in Piezo Mechanics Aid Eye Surgery http://www.pi-usa.us/blog/advances-in-piezo-mechanics-aid-eye-surgery/
Specifications, Datasheet, More Information > http://www.pi-usa.us/products/Microscopy_Imaging/Precision_Microscope_Stage.php#S335
Standard and Custom
PI has over 4 decades of experience providing in-house engineered precision motion control solutions, and can quickly modify existing product designs or provide a fully customized OEM part to fit the exact requirements of the customer’s application.
PI is a leading manufacturer of air bearing stages, piezoelectric solutions, precision motion control equipment, and hexapod parallel-kinematics for semiconductor applications, photonics, bio-nano-technology and medical engineering. PI has been developing and manufacturing standard & custom precision products with piezoceramic and electromagnetic drives for 4 decades. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. The PI group employs more than 1,000 people worldwide in 15 subsidiaries and R&D / engineering centers on 3 continents.
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