RF Generator delivers 1,200 W from 50-500 kHz.
Press Release Summary:
Model AG 1010-2HF RF Generator is suited for applications in plasma markets including etch, thin film, deposition, and existing drop-in replacement markets. It includes 7-position built-in switch-selectable impedance transformer, RS232 communication ports, and front panel control of amplifier and generator functions. LCD digital front panel metering provides user with FWD, REV, and LOAD power measurement accuracy better than ±3%.
Original Press Release:
Highly Advanced, AG 1010-2HF RF Generator Offers a Drop-in Replacement for the Obsolete "ENI PL-2HF"
. "Direct Replacement", "Pin for Pin compatible", "Plug and Play".
. The AG 1010-2HF is "2.5 TIMES SMALLER" and "2 TIMES LIGHTER".
. 1200 Watts of Precise RF Power from 50 kHz to 500 kHz.
. Design includes a seven (7) Position Built-in Switch Selectable Impedance Transformer.
Rochester, NY, February 1, 2008 - T&C Power Conversion announced today that it is releasing a new AG 1010-2HF RF Generator. It is the latest T&C release in a line of "ENI" replacement units. The AG 1010-2HF RF Generators are well suited for many applications in the Plasma Markets including Etch, Thin Film, Deposition and the existing drop-in replacement markets. This RF Generator offers a wide frequency band, rugged design, power accuracy, compact, reliable, stable and optimized process performance. The new AG 1010-2HF, replacement for the obsolete PL-2HF generator has many outstanding features including RS232 communication ports for interfacing to T&Cs' latest GUI (graphic User Interface), front panel control of amplifier and generator functions, built-in Impedance Matching Transformer with manual selectable seven (7) position settings, and a exceptional T&C LCD Digital Front Panel Metering that provides the user with FWD, REV and LOAD power measurement accuracy better than +/- 3%.
T&C Power Conversion, Inc. is a leading provider of RF Generators and RF Amplifiers. T&C builds quality world class designs of RF Generators and RF Amplifiers. For more information about T&C Power Conversion, Inc. products please visit our web site: www.TCPowerConversion.com
