Refrigerating/Heating Chiller has adjustable controls/alarms.
Press Release Summary:
Featuring adjustable temperature, pressure, and flow rate alarms, 1.5 ton Refrigerating/Heating Chiller provides heating and cooling for semiconductor fabrication processes. Integral 7,500 or 9,000 W heater controls temperature during vacuum chamber or reaction vessel heating, soaking, and cooling cycles. From 5 to 90°C, with ±0.5°C temperature stability, chiller provides up to 6,328 W of cooling. Its ¾ or 1 hp turbine pump accommodates various process flow and pressure requirements.
Original Press Release:
Refrigerating/Heating Chiller Provides Reliable Temperature Control for Semiconductor Process Tools
Niles, IL - A highly reliable chiller that provides both heating and cooling capability for semiconductor fabrication processes is now available from PolyScience. Ideal for use with ion implantation, sputtering, etching, and vapor deposition equipment, the PolyScience 1.5 ton Refrigerating/Heating Chiller is available with an integral 7500 or 9000 watt heater that permits precise temperature control during vacuum chamber or reaction vessel heating, soaking, and cooling cycles. The chiller features a temperature control range of 5° to 90°C, ±0.5°C temperature stability, and is capable of providing up to 6328 watts of cooling. The ¾ or 1 HP turbine pump accommodates a broad range of process flow and pressure requirements.
Designed and engineered to optimize process protection, the PolyScience 1.5 ton Refrigerating/Heating Chiller features adjustable temperature, pressure, and flow rate alarms that provide a virtually instantaneous warning to problems - such as blocked cooling lines or overload conditions - which could damage fabrication equipment or compromise wafer yield or throughput. Other standard features include an air-cooled or water-cooled condenser, digital large temperature and pressure/flow rate readouts, one-touch temperature control, and 3 gallon stainless steel reservoir. A DI water package is also available.
For more information on the PolyScience 1.5 ton Refrigerating/Heating Chillers - call toll-free 1-800-229-7569 (847-647-0611 outside the United States), email sales@polyscience.com, or fax the company at 847-647-1155.
