Precision Linear Stage is designed for 8 in. wafers.
Press Release Summary:
With overall height of 55 mm, precision linear stage model KDT450-205-SM-L offers standard travel of 205 x 245 mm, repeatability of 1 micron, and standard resolution of 20 nm. Table weighs 10 kg and is manufactured from high-strength anodized aluminum, and has speeds up to 100 mm/sec with acclerations of 500 mm/s². Standard stage includes stationary terminal and integrated cables for motor, measuring system, and vacuum connectors for chucks.
Original Press Release:
New Automatic Inspection System for 8" Wafer
BURLINGTON, MA, February 7, 2007 --Steinmeyer, Inc. announced a new precision linear stage model KDT450-205-SM-L. This table features a sleek low profile design with an overall height of only 55 mm and it offers a standard travel of 205 mm X 245 mm and repeatability of 1 micron and standard resolution is 20 nm. Included inside this compact design are the drive mechanisms, encapsulated Steinmeyer precision ball screw and a stepper motor with incremental linear encoder. Manufactured from high strength anodized aluminum the table weighs less than 10 kg and offer speeds up to 100mm/s with accelerations of 500 mm/s² are easily achieved. The unit is also suitable for a class 10 clean room.
The standard stage includes a stationary terminal and integrated cables for motor, measuring system and vacuum connectors for chucks. Stage drives optional 40 mm to the left or right assymetric to the optical axis which simplifies the automatic loading and unloading of the wafers. It also offers an apperature of 84mm through the center. Options available are class 1 clean room compatibility,
The KDT450-205-SM-L is ideal for applications in the semiconductor industry!
The Steinmeyer group is comprised of two manufacturing divisions located in Germany. August Steinmeyer GmbH & Co. KG (located in Albstadt) has been setting standards for high precision balls crews for over 40 years and prides itself on high quality, innovative designs to meet demanding customer requirements. Our Feinmess Dresden (FMD) division has been producing an extensive line of high precision positioning systems for well over 130 years.
For further information on this new product or others in our extensive product portfolio
call 1-781-273-6220 or visit the Steinmeyer FMD group at the following web site: www.steinmeyer.com
